Dual Resonator MEMS Magnetic Field Gradiometer.

Kahr, Matthias; Stifter, Michael; Steiner, Harald; Hortschitz, Wilfried; Kovács, Gabor; Kainz, Andreas; Schalko, Johannes; Keplinger, Franz

Kahr, Matthias; Stifter, Michael; Steiner, Harald; Hortschitz, Wilfried; Kovács, Gabor; Kainz, Andreas; Schalko, Johannes; Keplinger, Franz.

Afiliación

Kahr M; Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria. matthias.kahr@donau-uni.ac.at.
Stifter M; Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria. michael.stifter@donau-uni.ac.at.
Steiner H; Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria. harald.steiner@donau-uni.ac.at.
Hortschitz W; Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria. wilfried.hortschitz@donau-uni.ac.at.
Kovács G; Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria. gabor.kovacs@donau-uni.ac.at.
Kainz A; Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria. andreas.kainz@tuwien.ac.at.
Schalko J; Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria. johannes.schalko@tuwien.ac.at.
Keplinger F; Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria. franz.keplinger@tuwien.ac.at.

Sensors (Basel) ; 19(3)2019 Jan 25.

Article en En | MEDLINE | ID: mdl-30691030

Palabras clave

Gradiometer; Lorentz force; MEMS; magnetic field; optical readout; sensor

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2019 Tipo del documento: Article País de afiliación: Austria Pais de publicación: Suiza

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