Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode.

Toan, Nguyen Van; Shimazaki, Tsuyoshi; Inomata, Naoki; Song, Yunheub; Ono, Takahito

Toan, Nguyen Van; Shimazaki, Tsuyoshi; Inomata, Naoki; Song, Yunheub; Ono, Takahito.

Afiliación

Toan NV; Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan. nvtoan@nme.mech.tohoku.ac.jp.
Shimazaki T; Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan. shimazaki@nme.mech.tohoku.ac.jp.
Inomata N; Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan. inomata@nme.mech.tohoku.ac.jp.
Song Y; Department of Electronic Engineering, Hanyang University, Seoul 04763, Korea. yhsong2008@hanyang.ac.kr.
Ono T; Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan. ono@nme.mech.tohoku.ac.jp.

Micromachines (Basel) ; 8(10)2017 Oct 20.

Article en En | MEDLINE | ID: mdl-30400502

Palabras clave

and high-order mode; capacitive silicon resonator; nanomechanical resonator; selective vibration

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2017 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Suiza

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