A Simple Extraction Method of Young's Modulus for Multilayer Films in MEMS Applications.

Guo, Xin-Ge; Zhou, Zai-Fa; Sun, Chao; Li, Wei-Hua; Huang, Qing-An

Guo, Xin-Ge; Zhou, Zai-Fa; Sun, Chao; Li, Wei-Hua; Huang, Qing-An.

Afiliación

Guo XG; Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. guoxinge93@outlook.com.
Zhou ZF; Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. zfzhou@seu.edu.cn.
Sun C; Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. sun_chaos@seu.edu.cn.
Li WH; Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. liwh@seu.edu.cn.
Huang QA; Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. hqa@seu.edu.cn.

Micromachines (Basel) ; 8(7)2017 Jun 23.

Article en En | MEDLINE | ID: mdl-30400391

Palabras clave

FEM; Young's modulus; cantilever; resonance frequency; thin film

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2017 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza

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