The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator.

Xie, Jianbing; Chen, Lei; Xie, Hui; Zhou, Jinqiu; Liu, Guangcheng

Xie, Jianbing; Chen, Lei; Xie, Hui; Zhou, Jinqiu; Liu, Guangcheng.

Afiliación

Xie J; Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China. xiejb@nwpu.edu.cn.
Chen L; Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China. cl@mail.nwpu.edu.cn.
Xie H; Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China. hhx@mail.nwpu.edu.cn.
Zhou J; Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China. zjq523543302@mail.nwpu.edu.cn.
Liu G; Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China. lgc1995@mail.nwpu.edu.cn.

Micromachines (Basel) ; 9(2)2018 Jan 24.

Article en En | MEDLINE | ID: mdl-30393318

Palabras clave

chemical foaming process; glassblowing; hemisphere resonator; hemisphere resonator gyroscope; hemisphere shell; hollow glass microsphere; micro electro mechanical systems (MEMS)

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2018 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza

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