Fabrication of buried nanostructures by atomic layer deposition.

Ali, Rizwan; Saleem, Muhammad Rizwan; Roussey, Matthieu; Turunen, Jari; Honkanen, Seppo

Ali, Rizwan; Saleem, Muhammad Rizwan; Roussey, Matthieu; Turunen, Jari; Honkanen, Seppo.

Afiliación

Ali R; Institute of Photonics, University of Eastern Finland, Joensuu, P.O. Box 111, FI-80101, Finland. rizwan.ali@uef.fi.
Saleem MR; Institute of Photonics, University of Eastern Finland, Joensuu, P.O. Box 111, FI-80101, Finland.
Roussey M; U.S.-Pakistan Center for Advanced Studies in Energy (USPCAS-E), National University of Sciences and Technology (NUST), Sector H-12, Islamabad, P.O. Box 44000, Pakistan.
Turunen J; Institute of Photonics, University of Eastern Finland, Joensuu, P.O. Box 111, FI-80101, Finland.
Honkanen S; Institute of Photonics, University of Eastern Finland, Joensuu, P.O. Box 111, FI-80101, Finland.

Sci Rep ; 8(1): 15098, 2018 Oct 10.

Article en En | MEDLINE | ID: mdl-30305641

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2018 Tipo del documento: Article País de afiliación: Finlandia Pais de publicación: Reino Unido

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