High accuracy transfer printing of single-mode membrane silicon photonic devices.
Opt Express
; 26(13): 16679-16688, 2018 Jun 25.
Article
en En
| MEDLINE
| ID: mdl-30119492
A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100±70nm. Silicon (Si) µ-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide.
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1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Opt Express
Asunto de la revista:
OFTALMOLOGIA
Año:
2018
Tipo del documento:
Article
Pais de publicación:
Estados Unidos