A novel sensor for two-degree-of-freedom motion measurement of linear nanopositioning stage using knife edge displacement sensing technique.

Zolfaghari, Abolfazl; Jeon, Seongkyul; Stepanick, Christopher K; Lee, ChaBum

Zolfaghari, Abolfazl; Jeon, Seongkyul; Stepanick, Christopher K; Lee, ChaBum.

Afiliación

Zolfaghari A; Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA.
Jeon S; Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA.
Stepanick CK; Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA.
Lee C; Department of Mechanical Engineering, Tennessee Technological University, 1 William L Jones Dr., Cookeville, Tennessee 38505, USA.

Rev Sci Instrum ; 88(6): 065110, 2017 Jun.

Article en En | MEDLINE | ID: mdl-28667986

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2017 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos

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