Characterizing Patterned Block Copolymer Thin Films with Soft X-rays.

Sunday, Daniel F; Ren, Jiaxing; Liman, Christopher D; Williamson, Lance D; Gronheid, Roel; Nealey, Paul F; Kline, R Joseph

Sunday, Daniel F; Ren, Jiaxing; Liman, Christopher D; Williamson, Lance D; Gronheid, Roel; Nealey, Paul F; Kline, R Joseph.

Afiliación

Sunday DF; National Institute of Standards and Technology , Gaithersburg, Maryland 20899, United States.
Ren J; Institute for Molecular Engineering, University of Chicago , Chicago, Illinois 60637, United States.
Liman CD; National Institute of Standards and Technology , Gaithersburg, Maryland 20899, United States.
Williamson LD; Institute for Molecular Engineering, University of Chicago , Chicago, Illinois 60637, United States.
Gronheid R; IMEC , Kapeldreef 75, B-3001 Leuven, Belgium.
Nealey PF; Institute for Molecular Engineering, University of Chicago , Chicago, Illinois 60637, United States.
Kline RJ; National Institute of Standards and Technology , Gaithersburg, Maryland 20899, United States.

ACS Appl Mater Interfaces ; 9(37): 31325-31334, 2017 Sep 20.

Article en En | MEDLINE | ID: mdl-28541658

Palabras clave

block copolymers; directed self-assembly; inverse problem; small-angle X-ray scattering; soft X-ray

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2017 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos

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