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Atomic layer deposition of diisopropylaminosilane on WO3(001) and W(110): a density functional theory study.
Lee, Kyungtae; Lee, Woojin; Lee, Hyo Sug; Shin, Jaikwang; Park, Jieun; Lee, Seongsuk; Choi, Samjong; Kim, Sueryeon; Kim, Jinseong; Shim, Youngseon.
Afiliación
  • Lee K; Platform Technology Lab, Samsung Advanced Institute of Technology, 130 Samsung-ro, Suwon, Gyeonggi-do 16678, South Korea. ys1231.shim@samsung.com.
  • Lee W; Platform Technology Lab, Samsung Advanced Institute of Technology, 130 Samsung-ro, Suwon, Gyeonggi-do 16678, South Korea. ys1231.shim@samsung.com.
  • Lee HS; Platform Technology Lab, Samsung Advanced Institute of Technology, 130 Samsung-ro, Suwon, Gyeonggi-do 16678, South Korea. ys1231.shim@samsung.com.
  • Shin J; Platform Technology Lab, Samsung Advanced Institute of Technology, 130 Samsung-ro, Suwon, Gyeonggi-do 16678, South Korea. ys1231.shim@samsung.com.
  • Park J; Memory Manufacturing Operation Center, Samsung Electronics Co., Ltd, 1, Samsungjeonja-ro, Hwasung, Gyeonggi-do 18448, South Korea.
  • Lee S; Memory Manufacturing Operation Center, Samsung Electronics Co., Ltd, 1, Samsungjeonja-ro, Hwasung, Gyeonggi-do 18448, South Korea.
  • Choi S; Memory Manufacturing Operation Center, Samsung Electronics Co., Ltd, 1, Samsungjeonja-ro, Hwasung, Gyeonggi-do 18448, South Korea.
  • Kim S; Memory Manufacturing Operation Center, Samsung Electronics Co., Ltd, 1, Samsungjeonja-ro, Hwasung, Gyeonggi-do 18448, South Korea.
  • Kim J; Memory Manufacturing Operation Center, Samsung Electronics Co., Ltd, 1, Samsungjeonja-ro, Hwasung, Gyeonggi-do 18448, South Korea.
  • Shim Y; Platform Technology Lab, Samsung Advanced Institute of Technology, 130 Samsung-ro, Suwon, Gyeonggi-do 16678, South Korea. ys1231.shim@samsung.com.
Phys Chem Chem Phys ; 18(42): 29139-29146, 2016 Oct 26.
Article en En | MEDLINE | ID: mdl-27730240
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Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Phys Chem Chem Phys Asunto de la revista: BIOFISICA / QUIMICA Año: 2016 Tipo del documento: Article País de afiliación: Corea del Sur Pais de publicación: Reino Unido
Buscar en Google
Añadir a Mi BVS
Imprimir
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PubMed Links

Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Phys Chem Chem Phys Asunto de la revista: BIOFISICA / QUIMICA Año: 2016 Tipo del documento: Article País de afiliación: Corea del Sur Pais de publicación: Reino Unido