Miniature hemispherical shell resonator with large-scale effective electrodes based on piezoelectric drive mechanism.

Tang, Jian; Zhang, Weiping; Cheng, Yuxiang; Liu, Wu; Wang, Yinghai; Sun, Dianjun

Tang, Jian; Zhang, Weiping; Cheng, Yuxiang; Liu, Wu; Wang, Yinghai; Sun, Dianjun.

Afiliación

Tang J; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Elec
Zhang W; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Elec
Cheng Y; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Elec
Liu W; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Elec
Wang Y; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Elec
Sun D; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education and Shanghai Key Lab of Navigation and Location-Based Services, Department of Micro-Nano Electronics, School of Electronic Information and Elec

Rev Sci Instrum ; 87(5): 055004, 2016 05.

Article en En | MEDLINE | ID: mdl-27250463

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2016 Tipo del documento: Article Pais de publicación: Estados Unidos

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