Nitrogen ion implantation into various materials using 28 GHz electron cyclotron resonance ion source.

Shin, Chang Seouk; Lee, Byoung-Seob; Choi, Seyong; Yoon, Jang-Hee; Kim, Hyun Gyu; Ok, Jung-Woo; Park, Jin Yong; Kim, Seong Jun; Bahng, Jungbae; Hong, Jonggi; Lee, Seung Wook; Won, Mi-Sook

Shin, Chang Seouk; Lee, Byoung-Seob; Choi, Seyong; Yoon, Jang-Hee; Kim, Hyun Gyu; Ok, Jung-Woo; Park, Jin Yong; Kim, Seong Jun; Bahng, Jungbae; Hong, Jonggi; Lee, Seung Wook; Won, Mi-Sook.

Afiliación

Shin CS; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Lee BS; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Choi S; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Yoon JH; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Kim HG; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Ok JW; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Park JY; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Kim SJ; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Bahng J; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Hong J; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.
Lee SW; School of Mechanical Engineering, Pusan National University, Pusan 609-735, South Korea.
Won MS; Busan Center, Korea Basic Science Institute, Busan 609-735, South Korea.

Rev Sci Instrum ; 87(2): 02A713, 2016 Feb.

Article en En | MEDLINE | ID: mdl-26931931

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2016 Tipo del documento: Article País de afiliación: Corea del Sur Pais de publicación: Estados Unidos

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