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Quantitative investigation of SiGeC layers using atom probe tomography.
Estivill, Robert; Grenier, Adeline; Duguay, Sébastien; Vurpillot, François; Terlier, Tanguy; Barnes, Jean-Paul; Hartmann, Jean-Michel; Blavette, Didier.
Afiliación
  • Estivill R; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France; STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France; Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France. Electronic address: robert.estivill@cea.fr.
  • Grenier A; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
  • Duguay S; Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
  • Vurpillot F; Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
  • Terlier T; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
  • Barnes JP; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
  • Hartmann JM; CEA, LETI, MINATEC Campus, 17 rue des Martyrs, 38054 Grenoble Cedex 9, France.
  • Blavette D; Groupe de Physique des Matériaux - GPM UMR CNRS 6634, Université de Rouen, France.
Ultramicroscopy ; 150: 23-29, 2015 Mar.
Article en En | MEDLINE | ID: mdl-25497493
The quantification of carbon and germanium in a Si/SiGeC multilayer structure using atom probe tomography has been investigated as a function of analysis conditions. The best conditions for quantitative results are obtained using an intermediate electric field and laser power. Carbon evaporation shows strong spatial and temporal correlation. By using multi-ion event analysis, an evaporation mechanism is put forward to explain the modification of mass spectra as a function of electric field and laser power.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Ultramicroscopy Año: 2015 Tipo del documento: Article Pais de publicación: Países Bajos
Texto completo
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Imprimir
XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Ultramicroscopy Año: 2015 Tipo del documento: Article Pais de publicación: Países Bajos