Novel design and sensitivity analysis of displacement measurement system utilizing knife edge diffraction for nanopositioning stages.

Lee, ChaBum; Lee, Sun-Kyu; Tarbutton, Joshua A

Lee, ChaBum; Lee, Sun-Kyu; Tarbutton, Joshua A.

Afiliación

Lee C; Department of Mechanical Engineering, University of South Carolina, 300 Main St., Columbia, South Carolina 29208, USA.
Lee SK; School of Mechatronics, Gwangju Institute of Science and Technology, 123 Cheomdangwagi-ro, Buk-gu, Gwangju 500-712, South Korea.
Tarbutton JA; Department of Mechanical Engineering, University of South Carolina, 300 Main St., Columbia, South Carolina 29208, USA.

Rev Sci Instrum ; 85(9): 095113, 2014 Sep.

Article en En | MEDLINE | ID: mdl-25273778

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Diagnostic_studies / Prognostic_studies Idioma: En Revista: Rev Sci Instrum Año: 2014 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos

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