UV spectral filtering by surface structured multilayer mirrors.
Opt Lett
; 39(5): 1185-8, 2014 Mar 01.
Article
en En
| MEDLINE
| ID: mdl-24690702
A surface structured extreme ultraviolet multilayer mirror was developed showing full band suppression of UV (λ=100-400 nm) and simultaneously a high reflectance of EUV light (λ=13.5 nm). The surface structure consists of Si pyramids, which are substantially transparent for EUV but reflective for UV light. The reflected UV is filtered out by blazed diffraction, interference, and absorption. A first demonstration pyramid structure was fabricated on a multilayer by using a straightforward deposition technique. It shows an average suppression of 14 times over the whole UV range and an EUV reflectance of 56.2% at 13.5 nm. This robust scheme can be used as a spectral purity solution for all XUV sources that emit longer wavelength radiation as well.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Opt Lett
Año:
2014
Tipo del documento:
Article
Pais de publicación:
Estados Unidos