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Development of microwave ion source for industrial applications.
Takahashi, N; Murata, H; Mitsubori, H; Sakuraba, J; Soga, T; Aoki, Y; Katoh, T; Saitoh, Y; Yamada, K; Ikenaga, N; Sakudo, N.
Afiliación
  • Takahashi N; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Murata H; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Mitsubori H; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Sakuraba J; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Soga T; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Aoki Y; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Katoh T; Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
  • Saitoh Y; Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan.
  • Yamada K; Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki, Takasaki, Gunma 370-1292, Japan.
  • Ikenaga N; Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan.
  • Sakudo N; Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan.
Rev Sci Instrum ; 85(2): 02C306, 2014 Feb.
Article en En | MEDLINE | ID: mdl-24593643
A microwave ion source is one of the long-life ion sources. In this paper, we report on the characteristics of the extracted Ar ion beam produced by a microwave ion source under various conditions, in terms of magnetic flux distribution and mass flow, and the stability of the ion beam. The measured spectra show that, under the experimental condition, almost all of produced ions were Ar(+) ions. For more than 6 h, the ion beam was stable.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2014 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Estados Unidos
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2014 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Estados Unidos