Equivalent circuit of radio frequency-plasma with the transformer model.
Rev Sci Instrum
; 85(2): 02B117, 2014 Feb.
Article
en En
| MEDLINE
| ID: mdl-24593557
LINAC4 H(-) source is radio frequency (RF) driven type source. In the RF system, it is required to match the load impedance, which includes H(-) source, to that of final amplifier. We model RF plasma inside the H(-) source as circuit elements using transformer model so that characteristics of the load impedance become calculable. It has been shown that the modeling based on the transformer model works well to predict the resistance and inductance of the plasma.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Tipo de estudio:
Prognostic_studies
Idioma:
En
Revista:
Rev Sci Instrum
Año:
2014
Tipo del documento:
Article
País de afiliación:
Japón
Pais de publicación:
Estados Unidos