Nanometric resolution with far-field optical profilometry.

Arhab, S; Soriano, G; Ruan, Y; Maire, G; Talneau, A; Sentenac, D; Chaumet, P C; Belkebir, K; Giovannini, H

Arhab, S; Soriano, G; Ruan, Y; Maire, G; Talneau, A; Sentenac, D; Chaumet, P C; Belkebir, K; Giovannini, H.

Afiliación

Arhab S; Aix-Marseille Université, CNRS, Centrale Marseille, Institut Fresnel, UMR 7249, 13013 Marseille, France.

Phys Rev Lett ; 111(5): 053902, 2013 Aug 02.

Article en En | MEDLINE | ID: mdl-23952401

RESUMEN

We show experimentally that a resolution far beyond that of conventional far-field optical profilometers can be reached with optical diffraction tomography. This result is obtained in the presence of multiple scattering when using an adapted inverse scattering algorithm for profile reconstruction. This new profilometry technique, whose resolution can be compared to that of atomic microscopes, also gives access to the permittivity of the surface.

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Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Phys Rev Lett Año: 2013 Tipo del documento: Article País de afiliación: Francia Pais de publicación: Estados Unidos

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