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Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading.
García-Gancedo, L; Pedrós, J; Zhao, X B; Ashley, G M; Flewitt, A J; Milne, W I; Ford, C J B; Lu, J R; Luo, J K.
Afiliación
  • García-Gancedo L; Electrical Engineering Division, Department of Engineering, University of Cambridge, Cambridge CB3 0FA, United Kingdom. luis.garcia-gancedo@eng.cam.ac.uk
Biosens Bioelectron ; 38(1): 369-74, 2012.
Article en En | MEDLINE | ID: mdl-22784500
Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics.
Asunto(s)

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Acústica / Técnicas Biosensibles / Proteínas Límite: Animals / Humans Idioma: En Revista: Biosens Bioelectron Asunto de la revista: BIOTECNOLOGIA Año: 2012 Tipo del documento: Article País de afiliación: Reino Unido Pais de publicación: Reino Unido

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Acústica / Técnicas Biosensibles / Proteínas Límite: Animals / Humans Idioma: En Revista: Biosens Bioelectron Asunto de la revista: BIOTECNOLOGIA Año: 2012 Tipo del documento: Article País de afiliación: Reino Unido Pais de publicación: Reino Unido