Dispersion and mirror transmission characteristics of bulk acoustic wave resonators.
IEEE Trans Ultrason Ferroelectr Freq Control
; 58(1): 215-25, 2011 Jan.
Article
en En
| MEDLINE
| ID: mdl-21244989
A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Tipo de estudio:
Prognostic_studies
Idioma:
En
Revista:
IEEE Trans Ultrason Ferroelectr Freq Control
Asunto de la revista:
MEDICINA NUCLEAR
Año:
2011
Tipo del documento:
Article
Pais de publicación:
Estados Unidos