Consequences of Ti-, Li-, and Er-ion implantations on the optical properties of single layers of Ta(2)O(5).
Appl Opt
; 35(25): 5085-90, 1996 Sep 01.
Article
en En
| MEDLINE
| ID: mdl-21102940
Tantalum pentoxide (Ta(2)O(5)) layers made by ion plating are implanted with a high fluence of keV Ti, Li, and Er ions. The resulting refractive-index profiles are given from the analysis of guided-wave propagation conditions. A comparison with spectrophotometric measurements is presented. All the implanted layers present low losses (extinction coefficient of some 10(-6)) after thermal annealing in air. Ti-implanted layers exhibit an increase in refractive index, whereas Li- and Er-implanted layers present a slight decrease in refractive index. Er-implanted layers present photoluminescent properties.
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1
Colección:
01-internacional
Base de datos:
MEDLINE
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En
Revista:
Appl Opt
Año:
1996
Tipo del documento:
Article
Pais de publicación:
Estados Unidos