Microstructure characterization by angle-resolved scatter and comparison to measurements made by other techniques.
Appl Opt
; 31(10): 1426-35, 1992 Apr 01.
Article
en En
| MEDLINE
| ID: mdl-20720774
The theory and measurement of angle-resolved scatter are described. Values of rms roughness that were obtained by using this technique to characterize four different materials are compared with values that were obtained by using a total integrated scatter measuring instrument, an optical profiler, and a mechanical profiler. The spatial frequency bandwidths and modulation transfer functions of the four instruments are different, and results are described in light of these differences.
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1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Appl Opt
Año:
1992
Tipo del documento:
Article
Pais de publicación:
Estados Unidos