A study on the influence of copper content in CrN/Cu nanocomposite thin films prepared by pulsed DC magnetron sputtering.
J Nanosci Nanotechnol
; 9(9): 5436-40, 2009 Sep.
Article
en En
| MEDLINE
| ID: mdl-19928239
Synthesis of nanocomposite thin films of CrN/Cu deposited on (100) Si and D-9 alloy substrates by pulsed magnetron sputtering as a function of copper content in the range 15.1-35.8 at.% is investigated. XRD analysis of the films deposited at 773 K with nitrogen flow rate of 10 sccm indicated that the films are nanorystalline and bi-phasic (fcc-CrN and fcc-Cu). Scanning electron microscopy showed a structureless morphology for CrN, while agglomerates were obtained for CrN/Cu nanocomposite thin films. Atomic force microscopy also confirmed the agglomeration of particles with increasing Cu content. The amount of copper content in the nanocomposite films had also shown a significant reduction in the crystallite size of CrN. The nano hardness measurements showed a peak hardness of 17 GPa for the films with copper content of 15.1 at.%. The hardness values were found to decrease significantly with Cu content > 31.1 at.%.
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01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
J Nanosci Nanotechnol
Año:
2009
Tipo del documento:
Article
País de afiliación:
India
Pais de publicación:
Estados Unidos