Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region.

Ejima, Takeo; Yamazaki, Atsushi; Banse, Takanori; Saito, Katsuhiko; Kondo, Yuji; Ichimaru, Satoshi; Takenaka, Hisataka

Ejima, Takeo; Yamazaki, Atsushi; Banse, Takanori; Saito, Katsuhiko; Kondo, Yuji; Ichimaru, Satoshi; Takenaka, Hisataka.

Afiliación

Ejima T; Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan. ejima@tagen.tohoku.ac.jp

Appl Opt ; 44(26): 5446-53, 2005 Sep 10.

Article en En | MEDLINE | ID: mdl-16161658

RESUMEN

Reflection measurements in the 25-35 nm region were made for Mg/SiC and Mg/Y2O3 multilayers kept in a low-humidity atmosphere for 4 or 5 years. Aged Mg/SiC multilayers keep their reflectances, and the reflectance value at 31.2 nm is 0.44 at 10 degrees of the normal angle of incidence. Aged Mg/Y2O3 multilayers change reflectance as top layer materials, and the best value at 30.1 nm is 0.40 at 10 degrees. Reflection measurements are also made for Mg-based multilayers that are annealed from room temperature to 400 degrees C at 50 degrees C intervals. Both multilayers keep their reflectance at annealing temperatures of 200 degrees C. These results suggest that both Mg-based multilayers can be applied to practical optics.

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Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Appl Opt Año: 2005 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Estados Unidos

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