Experimental characterization of subwavelength diffraction gratings by an inverse-scattering neural method.
J Opt Soc Am A Opt Image Sci Vis
; 19(12): 2394-402, 2002 Dec.
Article
en En
| MEDLINE
| ID: mdl-12469733
Characterization of gratings with small period-to-wavelength ratios is difficult to perform but is very helpful in improving the fabrication process. We experimentally tested an inverse-scattering method using a neural network on silicon etched gratings. We also characterized the gratings by using two popular microscopic methods. The validity of each method was determined by comparing measured diffracted intensities with calculated ones obtained from measured profiles. An estimation of accuracy and repeatability was deduced from a scan along a grating sample. This method was thus well validated for nondestructive and noninvasive measurements under experimental conditions that were close conditions of actual usage. This method is easy to implement and requires the measurement of only a few diffracted intensities.
Buscar en Google
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
J Opt Soc Am A Opt Image Sci Vis
Asunto de la revista:
OFTALMOLOGIA
Año:
2002
Tipo del documento:
Article
País de afiliación:
Francia
Pais de publicación:
Estados Unidos