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Thin films of transition metal oxides and oxynitrides have proven highly effective in protecting stainless steels against corrosion in both chemically aggressive environments and biological fluids. In the present work, cerium zirconium oxynitride thin films were deposited to enhance the corrosion resistance of surgical-grade stainless steel to be used in osteosynthesis processes. Two techniques were employed: co-sputtering and radiofrequency (RF) sputtering, and the morphology and corrosion efficiency of the coatings deposited by each technique were evaluated. X-ray diffraction, X-ray photoelectron spectroscopy and field emission transmission electron microscopy were used to characterize the morphological and chemical structure, respectively. Additionally, the corrosion resistance of the oxynitride-coated surgical grade stainless steel system (ZrCeOxNy-AISI 316L) was assessed using Hank's solution as the corrosive electrolyte, to determine its resistance to corrosion in biological media. The results show that ZrCeOxNy coatings increase the corrosion resistance of surgical grade stainless steel by two orders of magnitude and that the Ce(III)/Ce(IV) equilibrium decreases the corrosion rate, thereby increasing the durability of the steel in a biological environment. The results show that Ce coatings increase the corrosion resistance of surgical grade stainless steel by two orders of magnitude and that the Ce(III)/Ce(IV) equilibrium decreases the corrosion rate, thereby increasing the durability of the steel in a biological environment.

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Objective: This study aimed to evaluate the effect of coating titanium (Ti) dental implant with polyether ketone ketone (PEKK) polymer using magnetron sputtering on osseointegration, trying to overcome some of the problems associated with Ti alloys. Material and Methods: Implants were prepared from grade (II) commercially pure titanium (CP Ti), then laser was used to induce roughness on the surface of Ti. PEKK was deposited on the surface of Ti implants by radiofrequency (RF) magnetron sputtering technique. The implants were divided in to three groups: without coating (Ls), with PEKK coating using argon (Ar) as sputtering gas (Ls-PEKK-Ar), and with PEKK coating using nitrogen (N) as sputtering gas (Ls-PEKK-N). All the implants were implanted in the femoral bones of rabbits. After three different healing periods (2, 6, and 12 weeks) the rabbits were sacrificed for a mechanical examination (removal torque) and for histological examination. Results: The results revealed a significant increase in the removal torque mean values when using PEKK coating on Ti implants, with the highest value recorded by Ls-PEKK-N group. Histologically, the study demonstrated the progression of osteogenesis during all the research periods. It was observed that the Ls-PEKK-N group had the highest percentage of new bone formation in all healing periods. Conclusion: The use of PEKK as coating material on the surface of Ti implants by RF- magnetron sputtering results in an increase in the torque required to remove implants and enhance bony tissue formation around the implants especially when using nitrogen as a sputtering gas (AU)

Objetivo: Este estudo teve como objetivo avaliar o efeito do revestimento de implante dentário de titânio (Ti) com polímero de poliéter cetona cetona (PEKK) usando pulverização catódica por magnetron na osseointegração, tentando superar alguns dos problemas associados às ligas de Ti. Material e Métodos: Os implantes foram preparados a partir de titânio comercialmente puro grau (II) (CP Ti), em seguida o laser foi utilizado para induzir rugosidade na superfície do Ti. PEKK foi depositado na superfície de implantes de Ti pela técnica de pulverização catódica por radiofrequência (RF). Os implantes foram divididos em três grupos: sem revestimento (Ls), com revestimento de PEKK utilizando argônio (Ar) como gás de pulverização catódica (Ls-PEKK-Ar) e com revestimento de PEKK utilizando nitrogênio (N) como gás de pulverização catódica (Ls-PEKK -N). Todos os implantes foram implantados em ossos femorais de coelhos. Após três períodos de cicatrização diferentes (2, 6 e 12 semanas), os coelhos foram sacrificados para exame mecânico (torque de remoção) e exame histológico. Resultados: Os resultados revelaram um aumento significativo nos valores médios do torque de remoção quando se utilizou o revestimento de PEKK em implantes de Ti, sendo o maior valor registrado pelo grupo Ls-PEKK-N. Histologicamente, o estudo demonstrou a progressão da osteogênese durante todos os períodos da pesquisa Observou-se que o grupo Ls-PEKK-N apresentou maior percentual de neoformação óssea em todos os períodos de cicatrização. Conclusão: O uso de PEKK como material de revestimento na superfície de implantes de Ti por pulverização catódica RF-magnetron resulta em um aumento no torque necessário para remover os implantes e melhorar a formação de tecido ósseo ao redor dos implantes, especialmente quando se utiliza nitrogênio como gás de pulverização catódica(AU)

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The electron transport layer (ETL) plays a crucial role in solar cell technology, particularly in perovskite solar cells (PSCs), where nanostructured TiO2 films have been investigated as superior ETLs compared to compact TiO2. In this study, we explored the nanocolumnar growth of TiO2 in the anatase phase for bilayer thin films by DC reactive magnetron sputtering (MS) technique and glancing-angle deposition (GLAD). For the growth of the compact TiO2 layer, it was found that the crystalline quality of the films is strongly dependent on the sputtering power, and the samples deposited at 120 and 140 W are those with the best crystalline quality. However, for the nanocolumnar layer, the reactive atmosphere composition determined the best crystalline properties. By optimizing the growth parameters, the formation of TiO2 nanocolumns with a cross-sectional diameter ranging from 50 to 75 nm was achieved. The average thickness of the films exceeded 12.71 ± 0.5 µm. All nanostructured films were grown at a constant GLAD angle of 70°, and after deposition, the measured inclination angle of the nanocolumns is very close to this, having values between 68 and 80°. Furthermore, a correlation was observed between the quality of the initial layer and the enhanced growth of the TiO2 nanocolumns. All bilayer films are highly transparent, allowing light to pass through up to 90%, and present a band gap with values between 3.7 and 3.8 eV. This article offers the experimental parameters for the fabrication of a nanocolumnar TiO2 using the magnetron sputtering technique and the glancing-angle deposition configuration.

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This work presents a post-cured treatment alternative for photopolymer substrates considering the plasma produced via the sputtering process. The sputtering plasma effect was discussed, analyzing the properties of zinc/zinc oxide (Zn/ZnO) thin films deposited on photopolymer substrates, with and without ultraviolet (UV) treatment as a post-treatment process, after manufacturing. The polymer substrates were produced from a standard Industrial Blend resin and manufactured using stereolithography (SLA) technology. After that, the UV treatment followed the manufacturer's instructions. The influence of the sputtering plasma as an extra treatment during the deposition of the films was analyzed. Characterization was performed to determine the microstructural and adhesion properties of the films. The results showed the effect of plasma as a post-cured treatment alternative: fractures were found in thin films deposited on polymers with previous UV treatment. In the same way, the films showed a repetitive printing pattern due to the phenomenon of polymer shrinkage caused by the sputtering plasma. The plasma treatment also showed an effect on the thicknesses and roughness values of the films. Finally, according to VDI-3198 standards, coatings with acceptable adhesion failures were found. The results provide attractive properties of Zn/ZnO coatings on polymeric substrates produced by additive manufacturing.

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Melphalan (Mel) is an antineoplastic widely used in cancer and other diseases. Its low solubility, rapid hydrolysis, and non-specificity limit its therapeutic performance. To overcome these disadvantages, Mel was included in ß-cyclodextrin (ßCD), which is a macromolecule that increases its aqueous solubility and stability, among other properties. Additionally, the ßCD-Mel complex has been used as a substrate to deposit silver nanoparticles (AgNPs) through magnetron sputtering, forming the ßCD-Mel-AgNPs crystalline system. Different techniques showed that the complex (stoichiometric ratio 1:1) has a loading capacity of 27%, an association constant of 625 M-1, and a degree of solubilization of 0.034. Added to this, Mel is partially included, exposing the NH2 and COOH groups that stabilize AgNPs in the solid state, with an average size of 15 ± 3 nm. Its dissolution results in a colloidal solution of AgNPs covered by multiple layers of the ßCD-Mel complex, with a hydrodynamic diameter of 116 nm, a PDI of 0.4, and a surface charge of 19 mV. The in vitro permeability assays show that the effective permeability of Mel increased using ßCD and AgNPs. This novel nanosystem based on ßCD and AgNPs is a promising candidate as a Mel nanocarrier for cancer therapy.

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Biomaterials with adequate properties to direct a biological response are essential for orthopedic and dental implants. The surface properties are responsible for the biological response; thus, coatings with biologically relevant properties such as osteoinduction are exciting options to tailor the surface of different bulk materials. Metal oxide coatings such as TiO2, ZrO2, Nb2O5 and Ta2O5 have been suggested as promising for orthopedic and dental implants. However, a comparative study among them is still missing to select the most promising for bone-growth-related applications. In this work, using magnetron sputtering, TiO2, ZrO2, Ta2O5, and Nb2O5 thin films were deposited on Si (100) substrates. The coatings were characterized by Optical Profilometry, Scanning Electron Microscopy, Energy-Dispersive X-ray Spectroscopy, X-ray Photoelectron Spectroscopy, X-ray Diffraction, Water Contact Angle measurements, and Surface Free Energy calculations. The cell adhesion, viability, proliferation, and differentiation toward the osteoblastic phenotype of mesenchymal stem cells plated on the coatings were measured to define the biological response. Results confirmed that all coatings were biocompatible. However, a more significant number of cells and proliferative cells were observed on Nb2O5 and Ta2O5 compared to TiO2 and ZrO2. Nevertheless, Nb2O5 and Ta2O5 seemed to induce cell differentiation toward the osteoblastic phenotype in a longer cell culture time than TiO2 and ZrO2.

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The mechanical and wear behavior of CrN/CrAlN multilayers were improved by tailoring the experimental conditions of a hybrid magnetron sputtering process based on a high-power impulse (HiPIMS) and two direct current magnetron sputtering (dcMS) power supplies. To this end, the influence of the base layer and of the combination of Cr and CrAl targets, which were switched to the dcMS and HiPIMS power supplies in different configurations, were investigated with respect to the growth of ceramic CrN/CrAlN multilayers onto commercial gas-nitrided diesel piston rings. The microstructure, grain morphology, and mechanical properties were evaluated by field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and instrumented nanoindentation. Bench wear tests simulating the operation of a combustion engine were conducted against a gray cast iron cylinder liner under reciprocating conditions using 0W20 oil as a lubricating agent enriched with Al2O3 particles. The results revealed a significant increase in hardness, resistance to plastic strain, and wear resistance when two CrAl targets were switched to a HiPIMS and a dcMS power supply, and a Cr target was powered by another dcMS power supply. The compressive coating stresses were slightly reduced due to the soft Cr base layer that enabled stress relief within the multilayer. The proposed concept of hybrid magnetron sputtering outperformed the commercial PVD coatings of CrN for diesel piston rings manufactured by cathodic arc evaporation.

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Diffusion bonding of Ti6Al4V to Al2O3 using Ni/Ti reactive nanomultilayers as interlayer material was investigated. For this purpose, Ni/Ti multilayer thin films with 12, 25, and 60 nm modulation periods (bilayer thickness) were deposited by d.c. magnetron sputtering onto the base materials' surface. The joints were processed at 750 and 800 °C with a dwell time of 60 min and under a pressure of 5 MPa. Microstructural characterization of the interfaces was conducted by scanning electron microscopy (SEM) with energy-dispersive X-ray spectroscopy (EDS), and electron backscatter diffraction (EBSD). The mechanical characterization of the joints was performed by nanoindentation, and hardness and reduced Young's modulus distribution maps were obtained across the interfaces. The joints processed at 800 °C using the three modulation periods were successful, showing the feasibility of using these nanolayered films to improve the diffusion bonding of dissimilar materials. Using modulation periods of 25 and 60 nm, it was also possible to reduce the bonding temperature to 750 °C and obtain a sound interface. The interfaces are mainly composed of NiTi and NiTi2 phases. The nanoindentation experiments revealed that the hardness and reduced Young's modulus at the interfaces reflect the observed microstructure.

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Photoelectrochemical (PEC) water oxidation using ternary oxide systems has been considered a promising approach for investigating the effective utilization of sunlight and the production of green fuel. Herein, we report a ternary-oxide-based CuWO4/BiVO4/FeCoOx film deposited entirely by RF-magnetron sputtering using homemade ceramic targets. Our CuWO4/BiVO4 photoanode exhibits a significant photocurrent density of 0.82 mA cm-2 at 1.23 V vs RHE under AM 1.5G illumination, which is a record 382% increase compared to that of the bare CuWO4 film. To further boost the PEC performance, we deposited an ultrathin layer of amorphous FeCoOx cocatalyst, resulting in a triple CuWO4/BiVO4/FeCoOx heterojunction with a significant reduction in onset potential and a 500% increase in the photocurrent density of bare CuWO4. Experimental and theoretical approaches were used to provide insights into the interfacial band alignment and photoinduced charge carrier pathway across heterojunctions. Our results reveal noticeable interface potential barriers for charge carriers at the CuWO4/BiVO4 heterojunction, potentially limiting its application in tandem systems. Conversely, the deposition of the FeCoOx ultrathin layer over the CuWO4/BiVO4 heterojunction induces a p-n junction on the BiVO4/FeCoOx interface, which, when combined with the abundant FeCoOx oxygen vacancies, results in improved charge separation and transport as well as enhanced photoelectrochemical stability. Our study provides a feasible strategy for producing photocatalytic heterojunction systems and introduces simple tools for investigating interface effects on photoinduced charge carrier pathways for PEC water splitting.

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ZnO and doped ZnO films with non-ferromagnetic metal have been widely used as biosensor elements. In these studies, the electrochemical measurements are explored, though the electrical impedance of the system. In this sense, the ferromagnetic properties of the material can be used for multifunctionalization of the sensor element using external magnetic fields during the measurements. Within this context, we investigate the room-temperature ferromagnetism in pure ZnO and Ag-doped ZnO films presenting zigzag-like columnar geometry. Specifically, we focus on the films' structural and quasi-static magnetic properties and disclose that they evolve with the doping of low-Ag concentrations and the columnar geometry employed during the deposition. The magnetic characterization reveals ferromagnetic behavior at room temperature for all studied samples, including the pure ZnO one. By considering computational simulations, we address the origin of ferromagnetism in ZnO and Ag-doped ZnO and interpret our results in terms of the Zn vacancy dynamics, its substitution by an Ag atom in the site, and the influence of the columnar geometry on the magnetic properties of the films. Our findings bring to light an exciting way to induce/explore the room-temperature ferromagnetism of a non-ferromagnetic metal-doped semiconductor as a promising candidate for biosensor applications.

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The search for coatings that extend the useful life of biomedical devices has been of great interest, and titanium has been of great relevance due to its innocuousness and low reactivity. This study contributes to the investigation of Ti/Ag films in different configurations (monolayer and multilayer) deposited by magnetron sputtering. The sessile droplet technique was applied to study wettability; greater film penetrability was obtained when Ag is the external layer, conferring high efficiency in cell adhesion. The morphological properties were characterized by SEM, which showed porous nuclei on the surface in the Ag coating and crystals embedded in the Ti film. The structural properties were studied by XRD, revealing the presence of TiO2 in the anatase crystalline phase in a proportion of 49.9% and the formation of a silver cubic network centered on the faces. Tafel polarization curves demonstrated improvements in the corrosion current densities of Ag/Ti/Ag/Ti/Ag/Ti/Ag/Ti and Ti/Ag compared to the Ag coating, with values of 0.1749, 0.4802, and 2.044 nA.m-2, respectively. Antimicrobial activity was evaluated against the bacteria Pseudomonas aeruginosa and Bacillus subtilis and the yeasts Candida krusei and Candida albicans, revealing that the Ti/Ag and Ag/Ti/Ag/Ti/Ag/Ti/Ag/Ti coatings exhibit promise in biomedical material applications.

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Different crystalline phases in sputtered TiO2 films were tailored to determine their surface and electrochemical properties, protein adsorption and apatite layer formation on titanium-based implant material. Deposition conditions of two TiO2 crystalline phases (anatase and rutile) were established and then grown on commercially pure titanium (cpTi) by magnetron sputtering to obtain the following groups: A-TiO2 (anatase), M-TiO2 (anatase and rutile mixture), R-TiO2 (rutile). Non-treated commercially pure titanium (cpTi) was used as a control. Surfaces characterization included: chemical composition, topography, crystalline phase and surface free energy (SFE). Electrochemical tests were conducted using simulated body fluid (SBF). Albumin adsorption was measured by bicinchoninic acid method. Hydroxyapatite (HA) precipitation was evaluated after 28 days of immersion in SBF. MC3T3-E1 cell adhesion, morphology and spreading onto the experimental surfaces were evaluated by scanning electron microscopy. Sputtering treatment modified cpTi topography by increasing its surface roughness. CpTi and M-TiO2 groups presented the greatest SFE. In general, TiO2 films displayed improved electrochemical behavior compared to cpTi, with M-TiO2 featuring the highest polarization resistance. Rutile phase exhibited a greater influence on decreasing the current density and corrosion rate, while the presence of a bi-phasic polycrystalline condition displayed a more stable passive behavior. M-TiO2 featured increased albumin adsorption. HA morphology was dependent on the crystalline phase, being more evident in the bi-phasic group. Furthermore, M-TiO2 displayed normal cell adhesion and morphology. The combination of anatase and rutile structures to generate TiO2 films is a promising strategy to improve biomedical implants properties including greater corrosion protection, higher protein adsorption, bioactivity and non-cytotoxicity effect.

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Photofunctionalization mediated by ultraviolet (UV) light seems to be a promising approach to improve the physico-chemical characteristics and the biological response of titanium (Ti) dental implants. Seeing that photofunctionalization is able to remove carbon from the surface, besides to promote reactions on the titanium dioxide (TiO2) layer, coating the Ti with a stable TiO2 film could potentialize the UV effect. Thus, here we determined the impact of UV-photofunctionalized mixed-phase (anatase and rutile) TiO2 films on the physico-chemical properties of Ti substrate and cell biology. Mixed-phase TiO2 films were grown by radiofrequency magnetron sputtering on commercially pure titanium (cpTi) discs, and samples were divided as follow: cpTi (negative control), TiO2 (positive control), cpTi UV, TiO2 UV (experimental). Photofunctionalization was performed using UVA (360 nm - 40 W) and UVC (250 nm - 40 W) lamps for 48 h. Surfaces were analyzed in terms of morphology, topography, chemical composition, crystalline phase, wettability and surface free energy. Pre-osteoblastic cells (MC3T3E1) were used to assess cell morphology and adhesion, metabolism, mineralization potential and cytokine secretion (IFN-γ, TNF-α, IL-4, IL-6 and IL-17). TiO2-coated surfaces exhibited granular surface morphology and greater roughness. Photofunctionalization increased wettability (p < 0.05) and surface free energy (p < 0.001) on both surface conditions. TiO2-treated groups featured normal cell morphology and spreading, and greater cellular metabolic activity at 2 and 4 days (p < 0.05), whereas UV-photofunctionalized surfaces enhanced cell metabolism, cell adhered area, and calcium deposition (day 14) (p < 0.05). In general, assessed proteins were found slightly affected by either UV or TiO2 treatments. Altogether, our findings suggest that UV-photofunctionalized TiO2 surface has the potential to improve pre-osteoblastic cell differentiation and the ability of cells to form mineral nodules by modifying Ti physico-chemical properties towards a more stable context. UV-modified surfaces modulate the secretion of key inflammatory markers.

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In this study, we investigated the structural properties of TeO2-ZnO (TZ) and TeO2-ZnO-Au (TZA) thin films sputtered under different oxygen concentrations and either annealed or not annealed at 325 °C in air for 10 or 20 h. The lattice changes of the tellurium oxide were shown to be inherent in the polymorph properties of the α and ß phases. The ß phase was formed for null oxygen flow and the α phase was formed for different oxygen flows (0.5-7.0 sccm) during TZ and TZA sputtering. Au was encountered in its single phase or as AuTe2. The annealing had very little influence on the α and ß phases for both TZ and TZA. It is worth noting that SiO2 and orthotellurate anions are both formed for not-null oxygen flow. An electrochemical mechanism was proposed to explain the SiO2 growth at the TZ/Si or TZA/Si interface, taking the orthotellurate anion as oxidizing agent into account.

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Silver nanoparticles were loaded in microfiltration membranes by sputtering technique for the development of biocidal properties and biofouling resistance. This technology allows good adhesion between silver nanoparticles and the membranes, and fast deposition rate. The microfiltration membranes (15 wt.% polyethersulfone and 7.5 wt.% polyvinylpyrrolidone in N,N-dimethylacetamide) were prepared by phase inversion method, and silver nanoparticles were deposited on their surface by the physical technique of vapor deposition in a sputtering chamber. The membranes were characterized by Field Emission Scanning Electron Microscopy, and the presence of silver was investigated by Energy-Dispersive Spectroscopy and X-ray Diffraction. Experiments of silver leaching were carried out through immersion and filtration tests. After 10 months of immersion in water, the membranes still presented ~90% of the initial silver, which confirms the efficiency of the sputtering technique. Moreover, convective experiments indicated that 98.8% of silver remained in the membrane after 24 h of operation. Biocidal analyses (disc diffusion method and biofouling resistance) were performed against Pseudomonas aeruginosa and confirmed the antibacterial activity of these membranes with 0.6 and 0.7 log reduction of viable planktonic and sessile cells, respectively. These results indicate the great potential of these new membranes to reduce biofouling effects.

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Multifunctional and multiresponsive thin films are playing an increasing role in modern technology. This work reports a study on the magnetic properties of ZnO and Ag-doped ZnO semiconducting films prepared with a zigzag-like columnar architecture and their correlation with the processing conditions. The films were grown through Glancing Angle Deposition (GLAD) co-sputtering technique to improve the induced ferromagnetism at room temperature. Structural and morphological characterizations have been performed and correlated with the paramagnetic resonance measurements, which demonstrate the existence of vacancies in both as-cast and annealed films. The magnetic measurements reveal changes in the magnetic order of both ZnO and Ag-doped ZnO films with increasing temperature, showing an evolution from a paramagnetic (at low temperature) to a diamagnetic behavior (at room temperature). Further, the room temperature magnetic properties indicate a ferromagnetic order even for the un-doped ZnO film. The results open new perspectives for the development of multifunctional ZnO semiconductors, the GLAD co-sputtering technique enables the control of the magnetic response, even in the un-doped semiconductor materials.

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The use of titanium oxynitride (TiOxNy) thin films as a saturable absorber (SA) element for generation of passive Q-switched (PQS) laser pulses, from a linear cavity Er-Yb double-clad fiber (EYDCF) laser, is demonstrated. Additionally, the deposition of the material as a thin film covering a fiber micro-ball lens (MBL) structure is reported for the first time. The TiOxNy coating is deposited by a direct current (DC) magnetron-sputtering technique. The MBL is inserted within the laser cavity in a reflection configuration, alongside a reflecting mirror. As a result, the coated fiber MBL simultaneously acts as a SA element for PQS laser pulses generation and as an interference filter for wavelength selection and tuning of the generated laser line. Tunable single-laser emission in a wavelength range limited by dual-wavelength laser generation at 1541.96 and 1547.04 nm is obtained. PQS laser pulses with a repetition rate from 18.67 to 124.04 kHz, minimum pulse duration of 3.57 µs, maximum peak power of 0.359 W, and pulse energy of 1.28 µJ were obtained in a pump power range from 1 to 1.712 W.

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In this work, we demonstrated lossy mode resonance (LMR) generation in optical fiber structures based on multimode fibers coated with aluminum-doped zinc oxide (AZO) films. AZO thin films were deposited by using radio frequency magnetron sputtering. In order to exhibit the usefulness of the LMR effect for sensing applications in optical fiber based systems, the deposition conditions of the AZO film coatings were set to obtain the second LMR order within the 1.55 µm wavelength range. An optical transmission configuration setup was used to investigate the LMR effect on fiber structures based on the use of no-core and cladding-removed multimode fibers coated with AZO films synthesized from metallic sputtering targets with different proportions of Zn:Al, 92:8% and 98:2%, at atomic concentrations. The optical and electrical/chemical features of the AZO films were characterized with UV-vis and XPS spectroscopy, respectively. The optical response of the proposed sensing configuration to refractive index (RI) variations was experimentally demonstrated. For the best approach, the sensitivity of wavelength displacement to RI variations on the liquid surrounding media was found to be 1214.7 nm/RIU.

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The aim of this study was to tailor the deposition parameters of magnetron sputtering to synthetize tantalum oxide (TaxOy) films onto commercially pure titanium (cpTi) surface. The structural and optical properties, morphology, roughness, elemental chemical composition and surface energy were assessed. The impact of TaxOy films on initial Streptococcus sanguinis adhesion was investigated. The morphology and spreading of pre-osteoblastic (MC3T3-E1) cells on a crystalline tantalum oxide film were evaluated. TaxOy films with estimated thickness of 600 nm and different structures (amorphous or crystalline) were produced depending on the various oxygen flow rates and parameters used. X-ray diffraction analysis revealed that the 8 O2 sccm (600 °C/400 W) group showed crystallization corresponding to the ß-Ta2O5 phase. Optical analysis showed that the 4 O2 sccm (200 °C 300 W) to 8 O2 sccm (600 °C 300 W) groups and 10 O2 sccm (200 °C 300 W) group presented regular and large-amplitude interference oscillations, suggesting high optical homogeneity of the films. The crystalline ß-Ta2O5 coating showed higher roughness and surface energy values than the other groups (P < .05) and was biocompatible. Compared with cpTi, the amorphous and crystalline tantalum oxide films did not increase bacterial adhesion (P > .05). By tailoring the deposition parameters, we synthetized a crystalline ß-Ta2O5 coating that improved titanium surface properties and positively affected cell spreading and morphology, making it a promising surface treatment for titanium-based implants.

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Many strategies have been developed for the synthesis of silicon carbide (SiC) thin films on silicon (Si) substrates by plasma-based deposition techniques, especially plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering, due to the importance of these materials for microelectronics and related fields. A drawback is the large lattice mismatch between SiC and Si. The insertion of an aluminum nitride (AlN) intermediate layer between them has been shown useful to overcome this problem. Herein, the high-power impulse magnetron sputtering (HiPIMS) technique was used to grow SiC thin films on AlN/Si substrates. Furthermore, SiC films were also grown on Si substrates. A comparison of the structural and chemical properties of SiC thin films grown on the two types of substrate allowed us to evaluate the influence of the AlN layer on such properties. The chemical composition and stoichiometry of the samples were investigated by Rutherford backscattering spectrometry (RBS) and Raman spectroscopy, while the crystallinity was characterized by grazing incidence X-ray diffraction (GIXRD). Our set of results evidenced the versatility of the HiPIMS technique to produce polycrystalline SiC thin films at near-room temperature by only varying the discharge power. In addition, this study opens up a feasible route for the deposition of crystalline SiC films with good structural quality using an AlN intermediate layer.