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The antenna-coupled microbolometer with suspended titanium heater and thermistor was attractive as a terahertz (THz) detector due to its structural simplicity and low noise levels. In this study, we attempted to improve the responsivity and noise-equivalent power (NEP) of the THz detector by using high-resistance heater stacked on the meander thermistor. A wide range of heater resistances were prepared by changing the heater width and thickness. It was revealed that the electrical responsivity and NEP could be improved by increasing the heater's resistance. To make the best use of this improvement, a high-impedance folded dipole antenna was introduced, and the optical performance at 1 THz was found to be better than that of the conventional halfwave dipole antenna combined with a low-resistance heater. Both the electrical and optical measurement results indicated that the increase in heater resistance could reduce the thermal conductance in the detector, thus improved the responsivity and NEP even if the thermistor resistance was kept the same.

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Various types of motion blur are frequently observed in the images captured by sensors based on thermal and photon detectors. The difference in mechanisms between thermal and photon detectors directly results in different patterns of motion blur. Motivated by this observation, we propose a novel method to synthesize blurry images from sharp images by analyzing the mechanisms of the thermal detector. Further, we propose a novel blur kernel rendering method, which combines our proposed motion blur model with the inertial sensor in the thermal image domain. The accuracy of the blur kernel rendering method is evaluated by the task of thermal image deblurring. We construct a synthetic blurry image dataset based on acquired thermal images using an infrared camera for evaluation. This dataset is the first blurry thermal image dataset with ground-truth images in the thermal image domain. Qualitative and quantitative experiments are extensively carried out on our dataset, which show that our proposed method outperforms state-of-the-art methods.

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In this work, the transient responses of a heated infrared (IR) temperature sensor were investigated to improve the reliability of determined target temperatures obtained from IR-based medical thermometers. A medical-grade IR temperature sensor was heated at the lower edge of the sidewall of the sensor. To reduce the uncertainty due to the conversion factor of the thermal detector, the temperature of the target, which was a thermostatted blackbody source, was determined when the observed target temperature and the temperature of the detector coincided during the heating and cooling of the sensor. When the determined target temperature was compared with the blackbody source temperature, it was found that during heating, due to the produced temperature gradient in the sensor, the observed target temperature showed erroneous depressions, resulting in the determined target temperature being considerably lower than the true target temperature. In contrast, the determined target temperature during cooling of the heated sensor was consistent with the tested blackbody source temperatures within the claimed uncertainty at all heating conditions. Therefore, based on the obtained results, it was concluded that temperature measurements using an IR temperature sensor could be carried out with the least uncertainty by determining the target temperature when the observed target and detector temperatures coincided during cooling of the heated sensor.

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The worldwide spread of COVID-19 has forced us to adapt to a new way of life made of social distancing, avoidance of physical contact and temperature checks before entering public places, in order to successfully limit the virus circulation. The role of technology has been fundamental in order to support the required changes to our lives: thermal sensors, in particular, are especially suited to address the needs arisen during the pandemic. They are, in fact, very versatile devices which allow performing contactless human body temperature measurements, presence detection and people counting, and automation of appliances and systems, thus avoiding the need to touch them. This paper reviews the theory behind thermal detectors, considering the different types of sensors proposed during the last ten years, while focusing on their possible employment for COVID-19 related applications.

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We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O2 environment. Substrates were kept at variable temperatures during the deposition. The PCT films were annealed at various temperatures in an O2 environment for 15 min. X-ray diffraction results confirm the polycrystalline nature of these films. Energy dispersive spectroscopy function of scanning electron microscope showed that the films are stoichiometric (Ca0.43Pb0.57) TiO3 (Ca/Ti = 0.5, Pb/Ti = 0.66). Temperature dependence of capacitance, pyroelectric current, and pyroelectric coefficient was investigated for different PCT films. Our results show that films deposited at 550 °C and 600 °C demonstrate better quality and larger values of the pyroelectric coefficient. On the other hand, the capacitance fabricated on the PCT films at 550 °C showed the highest value of pyroelectric current and pyroelectric coefficient which were 14 pA and at 30 °C was ~2 µC/m2K respectively at a higher temperature. In addition, we used density functional theory to determine the atomic and band structure, real and imaginary parts of dielectric constant and refractive index, and absorption and reflection constants with energy.

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Room-temperature highly sensitive microbolometers are becoming very attractive in infrared (IR) sensing with the increase in demand for the internet of things (IOT), night vision, and medical imaging. Different techniques, such as building extremely small-scale devices (nanotubes, etc.) or using 2D materials, showed promising results in terms of high sensitivity with the cost of challenges in fabrication and low-noise readout circuit. Here, we propose a new and simple technique on the application of joule heating on a clamped-clamped beam without adding any complexity. It provides much better uniformity in temperature distribution in comparison to conventional joule heating, and this results in higher thermal stresses on fixed ends. This consequently brings around 60.5× improvement in the overall temperature sensitivity according to both theory and COMSOL (multiphysics solver). The sensitivity increased with the increase in the stiffness constant, and it was calculated as 134 N/m for a device with a 60.5× improvement. A considerable amount of decrease in the operation temperature (36× below 383 K and 47× below 428 K) was achieved via a new technique. That's why the proposed solution can be used either to build highly reliable long-term devices or to increase the thermal sensitivity.

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Microbolometers and photon detectors are two main technologies to address the needs in Infrared Sensing applications. While the microbolometers in both complementary metal-oxide semiconductor (CMOS) and Micro-Electro-Mechanical Systems (MEMS) technology offer many advantages over photon detectors, they still suffer from nonlinearity and relatively low temperature sensitivity. This paper not only offers a reliable solution to solve the nonlinearity problem but also demonstrate a noticeable potential to build ultra-sensitive CMOS⁻MEMS temperature sensor for infrared (IR) sensing applications. The possibility of a 31× improvement in the total absolute frequency shift with respect to ambient temperature change is verified via both COMSOL (multiphysics solver) and theory. Nonlinearity problem is resolved by an operating temperature sensor around the beam bending point. The effect of both pull-in force and dimensional change is analyzed in depth, and a drastic increase in performance is achieved when the applied pull-in force between adjacent beams is kept as small as possible. The optimum structure is derived with a length of 57 µm and a thickness of 1 µm while avoiding critical temperature and, consequently, device failure. Moreover, a good match between theory and COMSOL is demonstrated, and this can be used as a guidance to build state-of-the-art designs.

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We briefly explain the fundamentals of detector nonlinearity applicable to both electrical and optical nonlinearity measurements. We specifically discuss the attenuation method for optical nonlinearity measurement that the NIST system is based upon, and we review the possible sources of nonlinearity inherent to thermal detectors used with high-power lasers. We also describe, in detail, the NIST nonlinearity measurement system, in which detector responsivity can be measured at wavelengths of 1.06 µm and 10.6 µm, over a power range from 1 W to 1000 W. We present the data processing method used and show measurement results depicting both positive and negative nonlinear behavior. The expanded uncertainty of a typical NIST high-power laser detector calibration including nonlinearity characterization is about 1.3 %.