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Acetaldehyde is a volatile organic compound that can cause damage at the cellular and genomic levels. The monitoring of acetaldehyde gas at low concentrations requires fast-response and low-cost sensors. Herein, we propose the design of an acetaldehyde gas sensor based on a low-cost Microelectromechanical System (MEMS) process. This sensor is formed by a single-clamped piezoelectric multilayer resonator (3000 × 1000 × 52.2 µm) with a simple operating principle and easy signal processing. This resonator uses a zinc oxide piezoelectric layer (1 µm thick) and a sensing film of titanium oxide (1 µm thick). In addition, the resonator uses a support layer of 304 stainless steel (50 µm thick) and two aluminum layers (100 nm thick). Analytical and Finite-Element Method (FEM) models are developed to predict the mechanical behavior of the gas sensor, considering the influence of the different layers of the resonator. The analytical results agree well with respect to the FEM model results. The gas sensor has a first bending frequency of 4722.4 Hz and a sensitivity of 8.22 kHz/g. A minimum detectable concentration of acetaldehyde of 102 ppm can be detected with the proposed sensor. This gas sensor has a linear behavior to detect different acetaldehyde concentrations using the frequency shifts of its multilayer resonator. The gas sensor design offers advantages such as small size, a light weight, and cost-efficient fabrication.

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Microgrippers are devices that have found applications in various fields of research and industry. They are driven by various actuation methods. In this article, an electrothermal rotary actuator recently proposed in the literature is explored to obtain a novel microgripper design (Model 1). In addition, the use of the rotary actuator as part of the chevron actuated microgrippers (Model 2) is also discussed. The theoretical analysis of the rotary actuator is supported by an equivalent U-shaped-like microactuator. The small error values validate the approximation used. Numerical modeling is performed with ANSYSTM (Student version 2022, ANSYS, PA, USA). A comparison of theoretical and numerical results provides acceptable error values. The total inter-jaw displacement values obtained for models 1 and 2 are 12.28 µm and 21.2 µm, respectively, and the reaction force is 8.96 µN and 34.2 µN, respectively. The performance parameters of both microgrippers could make their use feasible for different nanoapplications. Model 2 can be used when higher force and displacement are required.

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Based on a V-shaped microactuator with a pair of beams, modifications were made to the length and width of a microactuator to observe the effects. A theoretical approach and numerical characterization of the modified microactuator were performed. Its performance was compared to a similar microactuator with equal beam widths, and a V-shaped microactuator. The proposed microactuator, fed at 2 V, compared to the V-shaped actuator, showed a 370.48% increase in force, but a 29.8% decrease in displacement. The equivalent von Mises stress level increased (until 74.2 MPa), but was below the silicon ultimate stress. When the modified microactuator was applied to the proposed microgripper, compared to the case using a V-shaped actuator, the displacement between the jaws increased from 0.85 µm to 4.85 µm, the force from 42.11 mN to 73.61 mN, and the natural frequency from 11.36 kHz to 37.99 kHz; although the temperature increased, on average, from 42 °C up to 73 °C, it is not a critical value for many microobjects. The maximum equivalent von Mises stress was equal to 68.65 MPa. Therefore, it has been demonstrated that the new modified microactuator with damping elements is useful for the proposed microgripper of novel geometry, while a reduced area is maintained.

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A high-speed and high-temperature calorimetric solid-state thermal mass flow sensor (TMFS) design was proposed and its sensitivity to temperature and airflow speed were numerically assessed. The sensor operates at 573.15 Kelvin (300 °C), measuring speeds up to 265 m/s, and is customized to be a transducer for an aircraft Air Data System (ADS). The aim was to enhance the system reliability against ice accretion on pitot tubes' pressure intakes, which causes the system to be inoperative and the aircraft to lose protections that ensure its safe operation. In this paper, the authors assess how the distance between heater and thermal sensors affects the overall TMFS sensitivity and how it can benefit from the inclusion of a thermal barrier between these elements. The results show that, by increasing the distance between the heater and temperature sensors from 0.1 to 0.6 mm, the sensitivity to temperature variation is improved by up to 80%, and that to airspeed variation is improved by up to 100%. In addition, adding a thermal barrier made of Parylene-N improves it even further, by nearly 6 times, for both temperature and air speed variations.

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In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.

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Dielectric characteristics are useful to determine crucial properties of liquids and to differentiate between liquid samples with similar physical characteristics. Liquid recognition has found applications in a broad variety of fields, including healthcare, food science, and quality inspection, among others. This work demonstrates the fabrication, instrumentation, and functionality of a portable wireless sensor node for the permittivity measurement of liquids that require characterization and differentiation. The node incorporates an interdigitated microelectrode array as a transducer and a microcontroller unit with radio communication electronics for data processing and transmission, which enable a wide variety of stand-alone applications. A laser-ablation-based microfabrication technique is applied to fabricate the microelectromechanical systems (MEMS) transducer on a printed circuit board (PCB) substrate. The surface of the transducer is covered with a thin layer of SU-8 polymer by spin coating, which prevents it from direct contact with the Cu electrodes and the liquid sample. This helps to enhance durability, avoid electrode corrosion and contamination of the liquid sample, and to prevent undesirable electrochemical reactions to arise. The transducer's impedance was modeled as a Randles cell, having resistive and reactive components determined analytically using a square wave as stimuli, and a resistor as a current-to-voltage converter. To characterize the node sensitivity under different conditions, three different transducer designs were fabricated and tested for four different fluids, i.e., air, isopropanol, glycerin, and distilled water-achieving a sensitivity of 1.6965 +/- 0.2028 εr/pF. The use of laser ablation allowed the reduction of the transducer footprint while maintaining its sensitivity within an adequate value for the targeted applications.

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In recent years the most studied carbon allotrope has been graphene, due to the outstanding properties that this two-dimensional material exhibits; however, it turns out to be a difficult material to produce, pattern, and transfer to a device substrate without contamination. Carbon microelectromechanical systems are a versatile technology used to create nano/micro carbon devices by pyrolyzing a patterned photoresist, making them highly attractive for industrial applications. Furthermore, recent works have reported that pyrolytic carbon material can be graphitized by the diffusion of carbon atoms through a transition metal layer. In this work we take advantage of the latter two methods in order to produce multilayer graphene by improving the molecular ordering of photolithographically-defined pyrolytic carbon microstructures, through the diffusion (annealing) of carbon atoms through nickel, and also to eliminate any further transfer process to a device substrate. The allotropic nature of the final carbon microstructures was inspected by Raman spectroscopy (AverageID/IGof 0.2348 ± 0.0314) and TEM clearly shows well-aligned lattice planes of 3.34 Å fringe separation. These results were compared to measurements made on pyrolytic carbon (AverageID/IGof 0.9848 ± 0.0235) to confirm that our method is capable of producing a patterned multilayer graphene material directly on a silicon substrate.

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A ubiquitous sensor in embedded systems is the accelerometer, as it enables a range of applications. However, accelerometers experience nonlinearities in their outputs caused by error terms and axes misalignment. These errors are a major concern because, in applications such as navigations systems, they accumulate over time, degrading the position accuracy. Through a calibration procedure, the errors can be modeled and compensated. Many methods have been proposed; however, they require sophisticated equipment available only in laboratories, which makes them complex and expensive. In this article, a simple, practical, and low-cost calibration method is proposed. It uses a 3D printed polyhedron, benefiting from the popularisation and low-cost of 3D printing in the present day. Additionally, each polyhedron could hold as much as 14 sensors, which can be calibrated simultaneously. The method was performed with a low-cost sensor and it significantly reduced the root-mean-square error (RMSE) of the sensor output. The RMSE was compared with the reported in similar proposals, and our method resulted in higher performance. The proposal enables accelerometer calibration at low-cost, and anywhere and anytime, not only by experts in laboratories. Compensating the sensor's inherent errors thus increases the accuracy of its output.

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BACKGROUND: Ecological communities tend to be spatially structured due to environmental gradients and/or spatially contagious processes such as growth, dispersion and species interactions. Data transformation followed by usage of algorithms such as Redundancy Analysis (RDA) is a fairly common approach in studies searching for spatial structure in ecological communities, despite recent suggestions advocating the use of Generalized Linear Models (GLMs). Here, we compared the performance of GLMs and RDA in describing spatial structure in ecological community composition data. We simulated realistic presence/absence data typical of many ß-diversity studies. For model selection we used standard methods commonly used in most studies involving RDA and GLMs. METHODS: We simulated communities with known spatial structure, based on three real spatial community presence/absence datasets (one terrestrial, one marine and one freshwater). We used spatial eigenvectors as explanatory variables. We varied the number of non-zero coefficients of the spatial variables, and the spatial scales with which these coefficients were associated and then compared the performance of GLMs and RDA frameworks to correctly retrieve the spatial patterns contained in the simulated communities. We used two different methods for model selection, Forward Selection (FW) for RDA and the Akaike Information Criterion (AIC) for GLMs. The performance of each method was assessed by scoring overall accuracy as the proportion of variables whose inclusion/exclusion status was correct, and by distinguishing which kind of error was observed for each method. We also assessed whether errors in variable selection could affect the interpretation of spatial structure. RESULTS: Overall GLM with AIC-based model selection (GLM/AIC) performed better than RDA/FW in selecting spatial explanatory variables, although under some simulations the methods performed similarly. In general, RDA/FW performed unpredictably, often retaining too many explanatory variables and selecting variables associated with incorrect spatial scales. The spatial scale of the pattern had a negligible effect on GLM/AIC performance but consistently affected RDA's error rates under almost all scenarios. CONCLUSION: We encourage the use of GLM/AIC for studies searching for spatial drivers of species presence/absence patterns, since this framework outperformed RDA/FW in situations most likely to be found in natural communities. It is likely that such recommendations might extend to other types of explanatory variables.

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In recent years, controlled release of drugs has posed numerous challenges with the aim of optimizing parameters such as the release of the suitable quantity of drugs in the right site at the right time with the least invasiveness and the greatest possible automation. Some of the factors that challenge conventional drug release include long-term treatments, narrow therapeutic windows, complex dosing schedules, combined therapies, individual dosing regimens, and labile active substance administration. In this sense, the emergence of micro-devices that combine mechanical and electrical components, so called micro-electro-mechanical systems (MEMS) can offer solutions to these drawbacks. These devices can be fabricated using biocompatible materials, with great uniformity and reproducibility, similar to integrated circuits. They can be aseptically manufactured and hermetically sealed, while having mobile components that enable physical or analytical functions together with electrical components. In this review we present recent advances in the generation of MEMS drug delivery devices, in which various micro and nanometric structures such as contacts, connections, channels, reservoirs, pumps, valves, needles, and/or membranes can be included in their design and manufacture. Implantable single and multiple reservoir-based and transdermal-based MEMS devices are discussed in terms of fundamental mechanisms, fabrication, performance, and drug release applications.

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In this paper, we introduce a novel type of transdermal drug delivery device (TD3) with a micro-electro-mechanical system (MEMS) design using computer-aided design (CAD) techniques as well as computational fluid dynamics (CFD) simulations regarding the fluid interaction inside the device during the actuation process. For the actuation principles of the chamber and microvalve, both thermopneumatic and piezoelectric principles are employed respectively, originating that the design perfectly integrates those principles through two different components, such as a micropump with integrated microvalves and a microneedle array. The TD3 has shown to be capable of delivering a volumetric flow of 2.92 × 10-5 cm3/s with a 6.6 Hz membrane stroke frequency. The device only needs 116 Pa to complete the suction process and 2560 Pa to complete the discharge process. A 38-microneedle array with 450 µm in length fulfills the function of permeating skin, allowing that the fluid reaches the desired destination and avoiding any possible pain during the insertion.

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Nowadays, navigation systems are becoming common in the automotive industry due to advanced driver assistance systems and the development of autonomous vehicles. The MPU-6000 is a popular ultra low-cost Microelectromechanical Systems (MEMS) inertial measurement unit (IMU) used in several applications. Although this mass-market sensor is used extensively in a variety of fields, it has not caught the attention of the automotive industry. Moreover, a detailed performance analysis of this inertial sensor for ground navigation systems is not available in the previous literature. In this work, a deep examination of one MPU-6000 IMU as part of a low-cost navigation system for ground vehicles is provided. The steps to characterize the performance of the MPU-6000 are divided in two phases: static and kinematic analyses. Besides, an additional MEMS IMU of superior quality is also included in all experiments just for the purpose of comparison. After the static analysis, a kinematic test is conducted by generating a real urban trajectory registering an MPU-6000 IMU, the higher-grade MEMS IMU, and two GNSS receivers. The kinematic trajectory is divided in two parts, a normal trajectory with good satellites visibility and a second part where the Global Navigation Satellite System (GNSS) signal is forced to be lost. Evaluating the attitude and position inaccuracies from these two scenarios, it is concluded in this preliminary work that this mass-market IMU can be considered as a convenient inertial sensor for low-cost integrated navigation systems for applications that can tolerate a 3D position error of about 2 m and a heading angle error of about 3 °.

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New mobile devices need microphones with a small size, low noise level, reduced cost and high stability respect to variations of temperature and humidity. These characteristics can be obtained using Microelectromechanical Systems (MEMS) microphones, which are substituting for conventional electret condenser microphones (ECM). We present the design and modeling of a capacitive dual-backplate MEMS microphone with a novel circular diaphragm (600 µm diameter and 2.25 µm thickness) supported by fifteen polysilicon springs (2.25 µm thickness). These springs increase the effective area (86.85% of the total area), the linearity and sensitivity of the diaphragm. This design is based on the SUMMiT V fabrication process from Sandia National Laboratories. A lumped element model is obtained to predict the electrical and mechanical behavior of the microphone as a function of the diaphragm dimensions. In addition, models of the finite element method (FEM) are implemented to estimate the resonance frequencies, deflections, and stresses of the diaphragm. The results of the analytical models agree well with those of the FEM models. Applying a bias voltage of 3 V, the designed microphone has a bandwidth from 31 Hz to 27 kHz with 3 dB sensitivity variation, a sensitivity of 34.4 mV/Pa, a pull-in voltage of 6.17 V and a signal to noise ratio of 62 dBA. The results of the proposed microphone performance are suitable for mobile device applications.

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This paper reports the novel design of a touch mode capacitive pressure sensor (TMCPS) system with a wireless approach for a full-range continuous monitoring of ventricular pressure. The system consists of two modules: an implantable set and an external reading device. The implantable set, restricted to a 2 × 2 cm² area, consists of a TMCPS array connected with a dual-layer coil, for making a reliable resonant circuit for communication with the external device. The capacitive array is modelled considering the small deflection regime for achieving a dynamic and full 5⁻300 mmHg pressure range. In this design, the two inductive-coupled modules are calculated considering proper electromagnetic alignment, based on two planar coils and considering the following: 13.56 MHz frequency to avoid tissue damage and three types of biological tissue as core (skin, fat and muscle). The system was validated with the Comsol Multiphysics and CoventorWare softwares; showing a 90% power transmission efficiency at a 3.5 cm distance between coils. The implantable module includes aluminum- and polyimide-based devices, which allows ergonomic, robust, reproducible, and technologically feasible integrated sensors. In addition, the module shows a simplified and low cost design approach based on PolyMEMS INAOE® technology, featured by low-temperature processing.

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Primary tumors of patients can release circulating tumor cells (CTCs) to flow inside of their blood. The CTCs have different mechanical properties in comparison with red and white blood cells, and their detection may be employed to study the efficiency of medical treatments against cancer. We present the design of a novel MEMS microgripper with rotatory electrostatic comb-drive actuators for mechanical properties characterization of cells. The microgripper has a compact structural configuration of four polysilicon layers and a simple performance that control the opening and closing displacements of the microgripper tips. The microgripper has a mobile arm, a fixed arm, two different actuators and two serpentine springs, which are designed based on the SUMMiT V surface micromachining process from Sandia National Laboratories. The proposed microgripper operates at its first rotational resonant frequency and its mobile arm has a controlled displacement of 40 µm at both opening and closing directions using dc and ac bias voltages. Analytical models are developed to predict the stiffness, damping forces and first torsional resonant frequency of the microgripper. In addition, finite element method (FEM) models are obtained to estimate the mechanical behavior of the microgripper. The results of the analytical models agree very well respect to FEM simulations. The microgripper has a first rotational resonant frequency of 463.8 Hz without gripped cell and it can operate up to with maximum dc and ac voltages of 23.4 V and 129.2 V, respectively. Based on the results of the analytical and FEM models about the performance of the proposed microgripper, it could be used as a dispositive for mechanical properties characterization of circulating tumor cells (CTCs).

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Most commercially available cochlear implants and hearing aids use microphones as sensors for capturing the external sound field. These microphones are in general located in an external element, which is also responsible for processing the sound signal. However, the presence of the external element is the cause of several problems such as discomfort, impossibility of being used during physical activities and sleeping, and social stigma. These limitations have driven studies with the goal of developing totally implantable hearing devices, and the design of an implantable sensor has been one of the main challenges to be overcome. Different designs of implantable sensors can be found in the literature and in some commercial implantable hearing aids, including different transduction mechanisms (capacitive, piezoelectric, electromagnetic, etc), configurations microphones, accelerometers, force sensor, etc) and locations (subcutaneous or middle ear). In this work, a detailed technical review of such designs is presented and a general classification is proposed. The technical characteristics of each sensors are presented and discussed in view of the main requirements for an implantable sensor for hearing devices, including sensitivity, internal noise, frequency bandwidth and energy consumption. The feasibility of implantation of each sensor is also evaluated and compared.

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Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 µm × 100 µm × 2.25 µm). These actuators are composed by two beam types (2.25 µm thickness) with different cross-section area, which are separated by 2 µm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V®) process, obtaining a small footprint size (1028 µm × 1028 µm) for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width) and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption.

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Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases).

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An interferometric method is implemented in order to accurately assess the thermal fluctuations of a micro-cantilever sensor in liquid environments. The power spectrum density (PSD) of thermal fluctuations together with Sader's model of the cantilever allow for the indirect measurement of the liquid viscosity with good accuracy. The good quality of the deflection signal and the characteristic low noise of the instrument allow for the detection and corrections of drawbacks due to both the cantilever shape irregularities and the uncertainties on the position of the laser spot at the fluctuating end of the cantilever. Variation of viscosity below 0:03mPa·s was detected with the alternative to achieve measurements with a volume as low as 50 µL.

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Floating-gate MOS transistors have been widely used in diverse analog and digital applications. One of these is as a charge sensitive device in sensors for pH measurement in solutions or using gates with metals like Pd or Pt for hydrogen sensing. Efforts are being made to monolithically integrate sensors together with controlling and signal processing electronics using standard technologies. This can be achieved with the demonstrated compatibility between available CMOS technology and MEMS technology. In this paper an in-depth analysis is done regarding the reliability of floating-gate MOS transistors when charge produced by a chemical reaction between metallic oxide thin films with either reducing or oxidizing gases is present. These chemical reactions need temperatures around 200 °C or higher to take place, so thermal insulation of the sensing area must be assured for appropriate operation of the electronics at room temperature. The operation principle of the proposal here presented is confirmed by connecting the gate of a conventional MOS transistor in series with a Fe(2)O(3) layer. It is shown that an electrochemical potential is present on the ferrite layer when reacting with propane.

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