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Structured illumination plays an important role in advanced photographic and microscopic imaging applications. Here we report variable structured illumination (VSI) using Lissajous scanning techniques. The variable structured illumination module comprises Lissajous scanning micromirror and fiber-based diode pumped solid state (DPSS) laser with intensity modulation, combined with a stereo camera for dynamic stereo depth map. The micromirror projects static and discrete patterns by modulating the intensity of a laser beam at the least common multiple (LCM) of two scanning frequencies. The pattern density is increased by either decreasing the greatest common divisor (GCD) of scanning frequencies or decreasing the duty rate of the laser modulation. The scanning amplitude also controls the field-of-view (FOV) for the exact illumination of a target object for dynamic stereo depth map. The variable structured illumination module provides a new route for advanced imaging applications such as high-quality depth map, super-resolution, or motion recognition.
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We report a new microfabrication method of multifocal microlens arrays (MF-MLAs) for extended depth-of-field (DoF) using multilayer photolithography and thermal reflow. Microlenses of different focal lengths were simultaneously fabricated on a single glass wafer by using repeated photolithography with multiple photomasks to define microposts of different thicknesses and concurrent thermal reflow of multi-stacked microposts. The diverse lens curvatures of MF-MLAs are precisely controlled by the thickness of the micropost. Hexagonally packaged MF-MLAs clearly show three different focal lengths of 249 µm, 310 µm, and 460 µm for 200 µm in lens diameter and result in multifocal images on a single image sensor. This method provides a new route for developing various three-dimensional (3D) imaging applications such as light-field cameras or 3D medical endoscopes.
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We report an angle-selective optical filter (ASOF) for highly sensitive reflection photoplethysmography (PPG) sensors. The ASOF features slanted aluminum (Al) micromirror arrays embedded in transparent polymer resin, which effectively block scattered light under human tissue. The device microfabrication was done by using geometry-guided resist reflow of polymer micropatterns, polydimethylsiloxane replica molding, and oblique angle deposition of thin Al film. The angular transmittance through the ASOF is precisely controlled by the angle of micromirrors. For the mirror angle of 30 degrees, the ASOF accepts an incident light between - 90 to + 50 degrees and the maximum transmittance at - 55 degrees. The ASOF exhibits the substantial reduction of both the in-band noise of PPG signals over a factor of two and the low-frequency noise by three times. Consequently, this filter allows distinguishing the diastolic peak that allows miscellaneous parameters with diverse vascular information. This optical filter provides a new opportunity for highly sensitive PPG monitoring or miscellaneous optical tomography.
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This work reports electrothermal MEMS parallel plate-rotation (PPR) for a single-imager based stereoscopic endoscope. A thin optical plate was directly connected to an electrothermal MEMS microactuator with bimorph structures of thin silicon and aluminum layers. The fabricated MEMS PPR device precisely rotates an transparent optical plate up to 37° prior to an endoscopic camera and creates the binocular disparities, comparable to those from binocular cameras with a baseline distance over 100 µm. The anaglyph 3D images and disparity maps were successfully achieved by extracting the local binocular disparities from two optical images captured at the relative positions. The physical volume of MEMS PPR is well fit in 3.4 mm x 3.3 mm x 1 mm. This method provides a new direction for compact stereoscopic 3D endoscopic imaging systems.
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This work reports a microprism array (MPA) based compact stereo endoscopic camera with a single image sensor. The MPAs were monolithically fabricated by using two-step photolithography and geometry-guided resist reflow to form an appropriate prism angle for stereo image pair formation. The fabricated MPAs were transferred onto a glass substrate with a UV curable resin replica by using polydimethylsiloxane (PDMS) replica molding and then successfully integrated in front of a single camera module. The stereo endoscopic camera with MPA splits an image into two stereo images and successfully demonstrates the binocular disparities between the stereo image pairs for objects with different distances. This stereo endoscopic camera can serve as a compact and 3D imaging platform for medical, industrial, or military uses.
Asunto(s)
Endoscopía/instrumentación , Dispositivos ÓpticosRESUMEN
Many animal species employ highly conspicuous traits as courtship signals for successful mating. Fireflies utilize their bioluminescent light as visual courtship signals. In addition to efficient bioluminescent light emission, the structural components of the firefly lantern also contribute to the enhancement of conspicuous optical signaling. Recently, these firefly lantern ultrastructures have attracted much interest and inspired highly efficient light management approaches. Here we report on the unique optical function of the hierarchical ultrastructures found in a firefly (Pyrocoelia rufa) and their biological inspiration of highly efficient organic light-emitting diode (OLED) applications. The hierarchical structures are comprised of longitudinal nanostructures and asymmetric microstructures, which were successfully replicated using geometry-guided resist reflow, replica molding, and polydimethylsiloxane (PDMS) oxidation. The external quantum efficiency (EQE) of the bioinspired OLEDs was enhanced by up to 61%. The bioinspired OLEDs clearly showed side-enhanced super-Lambertian emission with a wide-viewing angle. The highly efficient light extraction and wide-angle illumination suggest how the hierarchical structures likely improve the recognition of firefly optical courtship signals over a wide-angle range. At the same time, the biologically inspired designs provide a new paradigm for designing functional optical surfaces for lighting or display applications.
RESUMEN
We report a new method, termed geometry-guided resist reflow, for the batch fabrication of asymmetric optical microstructures. Thermoplastic microstructures reflow along the geometric boundaries of the adjacent thermoset microstructures above the glass transition temperature of thermoplastic resin. The shape profiles can be freely formed as a concave, convex, or linear shape and the slope angle can also be tuned from 7 to 68 degrees, depending on the geometric parameters. This new method provides a new route for developing functional optical elements.