1.
Appl Opt
; 41(19): 4036-8, 2002 Jul 01.
Artículo
en Inglés
| MEDLINE
| ID: mdl-12099615
RESUMEN
We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston's law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.