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1.
Opt Express ; 24(5): 5087-5101, 2016 Mar 07.
Artículo en Inglés | MEDLINE | ID: mdl-29092337

RESUMEN

The modulus of the degree of coherence can be derived from interference patterns either by using fringes and next neighbour operations or by using several interferograms produced through phase shifting. Here the latter approach will be followed by using a lateral shearing interferometer exploiting a diffractive grating wedge providing a linearly progressive shear. Phase shifting methods offer pixel-oriented evaluations but suffer from instabilities and drifts which is the reason for the derivation of an error immune algorithm. This algorithm will use five π/2-steps of the reference phase also for the calculation of the modulus of the coherence function.

2.
Appl Opt ; 52(9): 1897-912, 2013 Mar 20.
Artículo en Inglés | MEDLINE | ID: mdl-23518735

RESUMEN

The homogeneity test of glass plates in a Fizeau interferometer requires the measurement of the glass sample in reflected as well as in transmitted light. For the measurement in transmitted light, the sample has to be inserted into the ray path of a Fizeau or Twyman-Green interferometer, which leads to a nested cavity setup. To separate the interference signals from the different cavities, we illuminate a Fizeau interferometer with an adaptive frequency comb. In this way, rigid glass plates can be measured, and linear variations in the homogeneity can also be detected. The adaptive frequency comb is provided by a variable Fabry-Perot filter under broadband illumination from a superluminescence diode. Compared to approaches using a two-beam interferometer as a filter for the broadband light source, the visibility of the fringe system is considerably higher.

3.
Appl Opt ; 52(1): 9-19, 2013 Jan 01.
Artículo en Inglés | MEDLINE | ID: mdl-23292371

RESUMEN

The 50-year life span of Applied Optics covers also approximately the time I have been engaged in optics. I started in 1962 [1] with the Institute for Optics and Spectroscopy, which was one of several Academy Institutes (mission statement: "theoria cum praxi," G. Leibniz) located in Berlin-Adlershof on the area of the first airfield in Berlin dating back to the beginning of the 20th century.

4.
Appl Opt ; 50(4): 571-8, 2011 Feb 01.
Artículo en Inglés | MEDLINE | ID: mdl-21283249

RESUMEN

Measurements of wavefront deformations can be carried out with the help of lateral shearing interferometers. Here the focus is on a setup providing two shears along orthogonal directions simultaneously to generate the data needed for a reconstruction. We describe a diffractive solution using Ronchi phase gratings with a suppressed zeroth order for both the doubling of the wavefront under test and the bidirectional shearing unit. A series arrangement of the gratings offers an on-axis geometry, which minimizes the systematic errors of the test. For illumination, an extended incoherent monochromatic light source is used. High-contrast fringes can be obtained by tailoring the degree of coherence via a periodic intensity distribution.

5.
Appl Opt ; 47(30): 5570-84, 2008 Oct 20.
Artículo en Inglés | MEDLINE | ID: mdl-18936805

RESUMEN

We report on interferometric characterization of a deep parabolic mirror with a depth of more than five times its focal length. The interferometer is of Fizeau type; its core consists of the mirror itself, a spherical null element, and a reference flat. Because of the extreme solid angle produced by the paraboloid, the alignment of the setup appears to be very critical and needs auxiliary systems for control. Aberrations caused by misalignments are removed via fitting of suitable functionals provided by means of ray tracing simulations. It turns out that the usual misalignment approximations fail under these extreme conditions.

6.
Appl Opt ; 46(28): 7040-8, 2007 Oct 01.
Artículo en Inglés | MEDLINE | ID: mdl-17906734

RESUMEN

Aspheric optical surfaces are often tested using diffractive optics as null elements. For precise measurements, the errors caused by the diffractive optical element must be calibrated. Recently, we reported first experimental results of a three position quasi-absolute test for rotationally invariant aspherics by using combined-diffractive optical elements (combo-DOEs). Here we investigate the effects of the DOE substrate errors on the proposed calibration procedure and present a set of criteria for designing an optimized combo-DOE. It is demonstrated that this optimized design enhances the overall consistency of the procedure. Furthermore, the rotationally varying part of the surface deviations is compared with the rotationally varying deviations obtained by an N-position averaging procedure and is found to be in good agreement.

7.
Appl Opt ; 45(34): 8606-12, 2006 Dec 01.
Artículo en Inglés | MEDLINE | ID: mdl-17119555

RESUMEN

We have already reported a method for the quasi-absolute test of rotationally symmetric aspheres by means of combined diffractive optical elements (combo-DOEs). The combo-DOEs carry the information for the ideal shape of an aspheric surface under test as well as a spherical wave for the measurement at the cat's eye position. An experimental demonstration of the procedure is given. Measurements with two different designs of combo-DOEs have been conducted, and their relative advantages and disadvantages are discussed.

8.
Appl Opt ; 45(31): 8013-8, 2006 Nov 01.
Artículo en Inglés | MEDLINE | ID: mdl-17068541

RESUMEN

Cylindrical specimens may be tested advantageously by using grazing-incidence interferometry. A multiple positions test in combination with rotational averaging has recently been used to separate the surface deviations of the specimen from the interferometric aberrations. To reduce the measuring time and to check whether the results are reliable, a second procedure is now investigated, which uses the principle of the multiple positions test to determine quantities proportional to the difference quotients of the surface deviations. After numerical integration, the results can be compared with those obtained previously by rotational averaging. The measurement principle is described, and calibration results are presented.

9.
Appl Opt ; 45(16): 3740-5, 2006 Jun 01.
Artículo en Inglés | MEDLINE | ID: mdl-16724131

RESUMEN

Interferometry in grazing incidence can be used to test cylindrical mantle surfaces. The absolute accuracy of the resulting surface profiles is limited by systematic wavefront aberrations caused in the interferometer, in particular due to an inversion of the test wavefront in an interferometer using diffractive beam splitters. For cylindrical specimens, a calibration method using four positions has therefore been investigated. This test is combined with another method of optical metrology: the rotational averaging procedure. The implementation for grazing incidence is described and measurement results for hollow cylinders are presented. The gain in accuracy is demonstrated.

10.
Appl Opt ; 44(15): 2970-7, 2005 May 20.
Artículo en Inglés | MEDLINE | ID: mdl-15929285

RESUMEN

A diffractive grazing-incidence interferometer for the test of cylindrical lenses is described. Besides surface aberrations from the ideal shape, the interferometer allows for the simultaneous determination of the relative position and orientation of surfaces to another. The measurement principle as well as a classification of deviation types is given. Measurement results for planar concave lenses are presented.

11.
Appl Opt ; 42(22): 4480-7, 2003 Aug 01.
Artículo en Inglés | MEDLINE | ID: mdl-12916612

RESUMEN

One important feature of grazing-incidence interferometry is the anamorphotic distortion or the fore-shortened view of the interference pattern along the optical axis caused by the geometry of theinterferometer. To compensate for the consequential lower resolution along the optical axis, a setup was built in which the object plane is imaged onto a rectifying grating, ensuring sharp mapping of the whole specimen onto the detector. A volume hologram and a diffraction grating serve as rectifying elements and are applied to measure various types of planar objects such as mirrors and structured plastic samples. Accuracy, image sharpness, and residual distortion for both cases are discussed.

12.
Appl Opt ; 42(4): 667-73, 2003 Feb 01.
Artículo en Inglés | MEDLINE | ID: mdl-12564486

RESUMEN

Discontinuous surface profiles, e.g., diffractive optical elements (DOEs), are commonly measured by white-light interferometry. White-light interferometry needs significantly more memory capacity and computer time than does phase-shifting interferometry; there are approximately ten times more frames to be taken to gather the required information about the object under test. But usually the grooves of the DOEs are too deep for single-wavelength phase-shifting interferometry. Here we show how phase-shifting techniques can be applied to DOEs. For this purpose three interference patterns are recorded simultaneously by a three-chip color CCD camera at three wavelengths (Red-green-blue). It is possible to calculate separately the optical path difference at each pixel from the three phase patterns modulo 2pi. The algorithms used and experimental results are presented.

13.
Appl Opt ; 41(13): 2440-7, 2002 May 01.
Artículo en Inglés | MEDLINE | ID: mdl-12009154

RESUMEN

Testing of aspherics by means of computer-generated holograms (CGHs) is well known. To perform a quasi-absolute test of rotationally symmetric aspheric surfaces, two wave fronts must be encoded in the CGH. Both the null lens and a spherical lens have to be stored. This enables successive measurements of the aspheric and of a cat's-eye position without changing the object arm of the interferometer. Two possibilities for encoding both wave fronts have been investigated. A first-order approximation for estimating the influence of disturbing diffraction orders is given.

14.
Appl Opt ; 41(1): 64-9, 2002 Jan 01.
Artículo en Inglés | MEDLINE | ID: mdl-11900447

RESUMEN

Grazing-incidence interferometry that makes use of diffractive axicons for the measurement of cylindrical mantle surfaces has already been reported. However, measurement of concave rod structures poses a severe problem because these structures are subject to spurious fringes caused by parasitic diffraction orders of the diffractive axicons. By breaking the symmetry of the interferometric setup it is possible to obtain unique interferograms of the inner mantle surfaces of hollow cylinders as cages for roller bearings or other workpieces produced on lathe machines that have a suitable surface finish. Special design issues for the computer-generated holograms and the interferometric setup are discussed, and test examples are given.

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