RESUMEN
The paper presents results of investigation on synthesis of non-porous ZrO2-Sc2O2 layers on tubular substrates by MOCVD (metalorganic chemical vapor deposition) method using Sc(tmhd)3 (Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)scandium(III), 99%) and Zr(tmhd)4 (Tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium)(IV), 99.9+%) as basic reactants. The molar content of Sc(tmhd)3 in the gas mixture was as follows: 14, 28%. The synthesis temperature was in the range of 600-700 °C. The value of extended Grx/Rex2 expression (Gr-Grashof number, Re-Reynolds number and x-the distance from the gas inflow point) was less than 0.01. The layers were deposited under reduced pressure or close to atmospheric pressure. The layers obtained were tested using scanning electron microscope (SEM) with an energy dispersive X-ray spectroscope (EDS) microanalyzer, X-ray diffractometer and UV-Vis spectrophotometer. The layers deposited were non-porous, amorphous or nanocrystalline with controlled chemical composition. The layers synthesized at 700 °C were nanocrystalline. ZrO2-Sc2O3 layers with 14 mol.% Sc2O3 content had a rhombohedral structure.
RESUMEN
This paper shows the results of an investigation on the synthesis of non-porous and nanocrystalline ZrO2-Gd2O3 layers by metalorganic chemical vapor deposition (MOCVD) with the use of Zr(tmhd)4 (tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium(IV)) and Gd(tmhd)3 (tris(2,2,6,6-tetramethyl-3,5-heptanedionato)gadolinium(III)). Argon and air were used as carrier gases. The molar content of Gd(tmhd)3 in the gas reaction mixture was as follows: 10% and 20%. The layers were synthesized on tubular substrates made of quartz glass at the temperatures of 550-700 °C. Synthesis conditions were established using the Grx/Rex2 expression (Gr is the Grashof number; Re is the Reynolds number; x is the distance from the gas inflow point). The value of this criterion was below 0.01. ZrO2-Gd2O3 layers synthesized at 600-700 °C were crystalline. When the molar content of Gd(tmhd)3 in the gas reaction mixture was 10 mol.%, a relationship between the chemical composition of the gas reaction mixture and that of the deposited layer could be observed. The synthesized layers underwent scanning electron microscopy, as well as X-ray analysis. The transparency of coated and uncoated glass was tested using UV-Vis spectroscopy. Their chemical composition was examined with the use of an EDS analyzer.