1.
IEEE Trans Ultrason Ferroelectr Freq Control
; 56(11): 2363-9, 2009 Nov.
Artículo
en Inglés
| MEDLINE
| ID: mdl-19942523
RESUMEN
This paper deals with the microwave study of coplanar tunable capacitors using Mn-doped Ba(0.6)Sr(0.4)TiO(3) ceramics. These ceramics are developed to improve performance at microwave frequencies (i.e., compromise between tuning capabilities and insertion losses). Interdigitated capacitors were first fabricated on thick Mn-doped BST ceramics. The capacitors showed reduced tuning factor because of a parasitic capacitance between the contact pads. The use of Mn-doped BST/ SiO(2) bilayers led to a significant enhancement of the capacitor performance (57% of agility under 200 V at 1 GHz).