RESUMEN
A novel method to double the measurement range of wavelength scanning interferometery (WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign ambiguity, that is, from an interference signal it is not possible to distinguish whether the OPD is positive or negative. The sign ambiguity can be resolved by measuring an interference signal in quadrature. A method to obtain a quadrature interference signal for WSI is described, and a theoretical analysis of the advantages is reported. Simulations of the advantages of the technique and of signal errors due to nonideal quadrature are discussed. The analysis and simulation are supported by experimental measurements to show the improved performances.
RESUMEN
A method to obtain unambiguous surface height measurements using wavelength scanning interferometry with an improved repeatability, comparable to that obtainable using phase shifting interferometry, is reported. Rather than determining the conventional fringe frequency-derived z height directly, the method uses the frequency to resolve the fringe order ambiguity, and combine this information with the more accurate and repeatable fringe phase derived z height. A theoretical model to evaluate the method's performance in the presence of additive noise is derived and shown to be in good agreement with experiments. The measurement repeatability is improved by a factor of ten over that achieved when using frequency information alone, reaching the sub-nanometre range. Moreover, the z-axis non-linearity (bleed-through or ripple error) is reduced by a factor of ten. These order of magnitude improvements in measurement performance are demonstrated through a number of practical measurement examples.