RESUMEN
A 2D calorimetric flow transducer is used to study distortions of the flow velocity field induced by small surface discontinuities around the chip. The transducer is incorporated into a matching recess of a PCB enabling wire-bonded interconnections to the transducer. The chip mount forms one wall of a rectangular duct. Two shallow recesses at opposite edges of the transducer chip are required for wired interconnections. They distort the flow velocity field inside the duct and deteriorate the flow setting precision. In-depth 3D-FEM analyses of the setup revealed that both the local flow direction as well as the surface-near distribution of the flow velocity magnitude deviate significantly from the ideal guided flow case. With a temporary leveling of the indentations, the impact of the surface imperfections could be largely suppressed. Including a yaw setting uncertainty of about ±0.5°, a peak-to-peak deviation of 3.8° of the transducer output from the intended flow direction was achieved with a mean flow velocity of 5 m/s in the duct corresponding to a shear rate of 2.4·104 s-1 at the chip surface. In view of the practical compromises, the measured deviation compares well with the peak-to-peak value of 1.74° predicted by previous simulations.
RESUMEN
This paper reports on a design and simulation study aiming at high-accuracy 2D micromachined thermal flow transducers. The scope is restricted to micromachined devices featuring a square-shaped membrane incorporating central symmetric thin-film devices. A microthermistor array probed spatial excess temperature variations while the main heat supply was alternatively established by optional heating resistors or by pronounced self-heating of the thermistor devices. Proper device designs enable leading edge transducer performance without sophisticated signal conditioning schemes. We found that a high azimuthal uniformity of flow magnitude transduction is tantamount to a precise azimuthal accuracy. The most advanced result gave a maximum azimuthal aberration of 0.17 and 1.7 degrees for 1 m/s and 10 m/s, respectively, while the corresponding magnitude uniformity amounted to 0.07% and 0.5%. Such excellent specifications exceed the need of ordinary meteorological applications by far. However, they are essential for, e.g., precise non-contact measurements of 2D relative movements of two quasi-planar surfaces via the related Couette flow in intermediate air gaps. The simulations predicted significantly better device characteristics than achieved by us in first experiments. However, this gap could be attributed to imperfect control of the flow velocity field by the measurement setup.
RESUMEN
Small-scale and distortion-free measurement of electric fields is crucial for applications such as surveying atmospheric electrostatic fields, lightning research, and safeguarding areas close to high-voltage power lines. A variety of measurement systems exist, the most common of which are field mills, which work by picking up the differential voltage of the measurement electrodes while periodically shielding them with a grounded electrode. However, all current approaches are either bulky, suffer from a strong temperature dependency, or severely distort the electric field requiring a well-defined surrounding and complex calibration procedures. Here we show that microelectromechanical system (MEMS) devices can be used to measure electric field strength without significant field distortion. The purely passive MEMS devices exploit the effect of electrostatic induction, which is used to generate internal forces that are converted into an optically tracked mechanical displacement of a spring-suspended seismic mass. The devices exhibit resolutions on the order of [Formula: see text] with a measurement range of up to tens of kilovolt per metre in the quasi-static regime (â² 300 Hz).We also show that it should be possible to achieve resolutions of around [Formula: see text] by fine-tuning of the sensor embodiment. These MEMS devices are compact and could easily be mass produced for wide application.
RESUMEN
This paper deals with the transduction of strain accompanying elastic waves in solids by firmly attached optical fibers. Stretching sections of optical fibers changes the time required by guided light to pass such sections. Exploiting interferometric techniques, highly sensitive fiber-optic strain transducers are feasible based on this fiber-intrinsic effect. The impact on the actual strain conversion of the fiber segment's shape and size, as well as its inclination to the elastic wavefront is studied. FEM analyses show that severe distortions of the interferometric response occur when the attached fiber length spans a noticeable fraction of the elastic wavelength. Analytical models of strain transduction are presented for typical transducer shapes. They are used to compute input-output relationships for the transduction of narrow-band strain pulses as a function of the mechanical wavelength. The described approach applies to many transducers depending on the distributed interaction with the investigated object.
RESUMEN
A thermal flow transduction method combining the advantages of calorimetric and hot-film transduction principles is developed and analyzed by Finite Element Method (FEM) simulations and confirmed experimentally. The analyses include electrothermal feedback effects of current driven NTC thermistors. Four thin-film germanium thermistors acting simultaneously as heat sources and as temperature sensors are embedded in a micromachined silicon-nitride membrane. These devices form a self-heated Wheatstone bridge that is unbalanced by convective cooling. The voltage across the bridge and the total dissipated power are exploited as output quantities. The used thin-film thermistors feature an extremely high temperature sensitivity. Combined with properly designed resistance values, a power demand in sub-1mW range enables efficient gas-flow transduction, as confirmed by measurements. Two sensor configurations with different arrangements of the membrane thermistors were examined experimentally. Moreover, we investigated the influence of different layouts on the rise time, the sensitivity, and the usable flow range by means of two-dimensional finite element simulations. The simulation results are in reasonable agreement with corresponding measurement data confirming the basic assumptions and modeling approach.