RESUMEN

This study aims to synthesize lead-free ferroelectric material, (Bi(1/2)Na(1/2))TiO3 using the Liquid Sprayed Mist Chemical Vapor Deposition (LSMCVD) technique. The mist of precursor solution was vaporized and deposited on two different substrates of Si(100) and (111)Pt/TiO2/SiO2/Si(100) in an oxygen atmosphere. The deposition temperature and time were varied in the range of 400-600 degrees C and 30-90 min. (Bi(1/2)Na(1/2))TiO3 thin film had preferred orientations of (110). The thickness of the thin film deposited was 35-162 nm. The remnant polarization (2Pr) and the dielectric constant were 4.6-16.8 microC/cm2, 325-350, respectively.

Asunto(s)

Microelectrodos , Nanopartículas/química , Titanio/química , Catálisis , Cristalización , Difusión , Conductividad Eléctrica , Microscopía de Fuerza Atómica , Modelos Químicos , Silicio/química , Propiedades de Superficie , Temperatura , Volatilización , Difracción de Rayos X