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[This corrects the article DOI: 10.1038/s41378-023-00525-z.].

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Replication of the human sense of touch would be highly advantageous for robots or prostheses as it would allow an agile and dexterous interaction with the environment. The article presents an approach for the integration of a micro-electromechanical system sensing skin with 144 tactile sensors on a soft, human-sized artificial fingertip. The sensing technology consists of thin, 1D sensing strips which are wrapped around the soft and curved fingertip. The sensing strips include 0.5 mm diameter capacitive sensors which measure touch, vibrations, and strain at a resolution of 1 sensor/mm2. The method allows to leverage the advantages of sensing skins over other tactile sensing technologies while showing a solution to integrate such skins on a soft three-dimensional body. The adaptable sensing characteristics are dominated by the thickness of a spray coated silicone layer, encapsulating the sensors in a sturdy material. We characterized the static and dynamic sensing capabilities of the encapsulated taxels up to skin thicknesses of 600 µm. Taxels with 600 µm skin layers have a sensitivity of 6 fF/mN, corresponding to an ∼5 times higher sensitivity than a human finger if combined with the developed electronics. They can detect vibrations in the full tested range of 0-600 Hz. The softness of a human finger was measured to build an artificial sensing finger of similar conformity. Miniaturized readout electronics allow the readout of the full finger with 220 Hz, which enables the observation of touch and slipping events on the artificial finger, as well as the estimation of the contact force. Slipping events can be observed as vibrations registered by single sensors, whereas the contact force can be extracted by averaging sensor array readouts. We verified the sturdiness of the sensing technology by testing single coated sensors on a chip, as well as the completely integrated sensing fingertip by applying 15 N for 10,000 times. Qualitative datasets show the response of the fingertip to the touch of various objects. The focus of this article is the development of the sensing hardware and the basic characterization of the sensing performance.

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Heat flux measurement shows potential for the early detection of infectious growth. Our research is motivated by the possibility of using heat flux sensors for the early detection of infection on aortic vascular grafts by measuring the onset of bacterial growth. Applying heat flux measurement as an infectious marker on implant surfaces is yet to be experimentally explored. We have previously shown the measurement of the exponential growth curve of a bacterial population in a thermally stabilized laboratory environment. In this work, we further explore the limits of the microcalorimetric measurements via heat flux sensors in a microfluidic chip in a thermally fluctuating environment.

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Wireless medical sensors typically utilize electromagnetic coupling or ultrasound for energy transfer and sensor interrogation. Energy transfer and management is a complex aspect that often limits the applicability of implantable sensor systems. In this work, we report a new passive temperature sensing scheme based on an acoustic metamaterial made of silicon embedded in a polydimethylsiloxane matrix. Compared to other approaches, this concept is implemented without additional electrical components in situ or the need for a customized receiving unit. A standard ultrasonic transducer is used for this demonstration to directly excite and collect the reflected signal. The metamaterial resonates at a frequency close to a typical medical value (5 MHz) and exhibits a high-quality factor. Combining the design features of the metamaterial with the high-temperature sensitivity of the polydimethylsiloxane matrix, we achieve a temperature resolution of 30 mK. This value is below the current standard resolution required in infrared thermometry for monitoring postoperative complications (0.1 K). We fabricated, simulated, in vitro tested, and compared three acoustic sensor designs in the 29-43 °C (~302-316 K) temperature range. With this concept, we demonstrate how our passive metamaterial sensor can open the way toward new zero-power smart medical implant concepts based on acoustic interrogation.

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Aortic vascular graft infections have high morbidity and mortality rate, however, patients often do not show symptoms. Continuous implant surface monitoring will allow for early detection of infections on implant surfaces, which allows for antibiotic treatment prior to biofilm formation. We explore the possibility of using heat flux sensors mounted on an aortic vascular graft to sense the localized heat production at the onset of infectious growth. We apply Finite Element Model simulations to demonstrate changes of the heat transfer coefficient depending on different pulsatile flow parameters. We determine various differences, the main influence being the distance travelled from the inlet of the simulation with the highest heat transfer coefficient closest to the inlet and decreasing along the direction of travel of the fluid. The determined range of heat transfer coefficients of 200 to 4800 W/m2 was applied to a second simulation of the thermal environment of the implant. We determined the heat transfer efficiency of the aortic graft system depending on different graft materials and thicknesses. We are further able to determine that the early detection of infection is possible by comparing the simulated amount of heat flux produced locally with the resolution of a commercial heat flux sensor.

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One-dimensional nanostructures such as carbon nanotubes offer excellent properties useful for applications in gas sensors, piezoresistive devices, and radio frequency resonators. Considering their nanoscale form factor, carbon nanotubes (CNTs) are highly sensitive to surface adsorbents. This study presents the fabrication flow of CNT devices with extended passivated areas around electrical contacts between the CNT and source and drain electrodes. These types of structures could help in understanding the intrinsic CNT response by eliminating the analyte impact on the Schottky barrier regions of the CNT field-effect transistors (CNTFETs). The influence of multiple processing conditions on the electronic properties of CNTFETs with a suspended individual CNT used as the CNTFET channel is presented. Our findings show a threshold voltage shift in CNT ISD-Vg characteristics following the metal deposition and alumina atomic layer deposition.

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All biological processes use or produce heat. Traditional microcalorimeters have been utilized to study the metabolic heat output of living organisms and heat production of exothermic chemical processes. Current advances in microfabrication have made possible the miniaturization of commercial microcalorimeters, resulting in a few studies on the metabolic activity of cells at the microscale in microfluidic chips. Here we present a new, versatile, and robust microcalorimetric differential design based on the integration of heat flux sensors on top of microfluidic channels. We show the design, modeling, calibration, and experimental verification of this system by utilizing Escherichia coli growth and the exothermic base catalyzed hydrolysis of methyl paraben as use cases. The system consists of a Polydimethylsiloxane based flow-through microfluidic chip with two 46 µl chambers and two integrated heat flux sensors. The differential compensation of thermal power measurements allows for the measurement of bacterial growth with a limit of detection of 1707 W/m3, corresponding to 0.021OD (2 ∙ 107 bacteria). We also extracted the thermal power of a single Escherichia coli of between 1.3 and 4.5 pW, comparable to values measured by industrial microcalorimeters. Our system opens the possibility for expanding already existing microfluidic systems, such as drug testing lab-on-chip platforms, with measurements of metabolic changes of cell populations in form of heat output, without modifying the analyte and minimal interference with the microfluidic channel itself.

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The identification of nanomaterials with the properties required for energy-efficient electronic systems is usually a tedious human task. A workflow to rapidly localize and characterize nanomaterials at the various stages of their integration into large-scale fabrication processes is essential for quality control and, ultimately, their industrial adoption. In this work, we develop a high-throughput approach to rapidly identify suspended carbon nanotubes (CNTs) by using high-speed Raman imaging and deep learning analysis. Even for Raman spectra with extremely low signal-to-noise ratios (SNRs) of 0.9, we achieve a classification accuracy that exceeds 90%, while it reaches 98% for an SNR of 2.2. By applying a threshold on the output of the softmax layer of an optimized convolutional neural network (CNN), we further increase the accuracy of the classification. Moreover, we propose an optimized Raman scanning strategy to minimize the acquisition time while simultaneously identifying the position, amount, and metallicity of CNTs on each sample. Our approach can readily be extended to other types of nanomaterials and has the potential to be integrated into a production line to monitor the quality and properties of nanomaterials during fabrication.

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Customizable, portable, battery-operated, wireless platforms for interfacing high-sensitivity nanoscale sensors are a means to improve spatiotemporal measurement coverage of physical parameters. Such a platform can enable the expansion of IoT for environmental and lifestyle applications. Here we report a platform capable of acquiring currents ranging from 1.5 nA to 7.2 µA full-scale with 20-bit resolution and variable sampling rates of up to 3.125 kSPS. In addition, it features a bipolar voltage programmable in the range of -10 V to +5 V with a 3.65 mV resolution. A Finite State Machine steers the system by executing a set of embedded functions. The FSM allows for dynamic, customized adjustments of the nanosensor bias, including elevated bias schemes for self-heating, measurement range, bandwidth, sampling rate, and measurement time intervals. Furthermore, it enables data logging on external memory (SD card) and data transmission over a Bluetooth low energy connection. The average power consumption of the platform is 64.5 mW for a measurement protocol of three samples per second, including a BLE advertisement of a 0 dBm transmission power. A state-of-the-art (SoA) application of the platform performance using a CNT nanosensor, exposed to NO2 gas concentrations from 200 ppb down to 1 ppb, has been demonstrated. Although sensor signals are measured for NO2 concentrations of 1 ppb, the 3σ limit of detection (LOD) of 23 ppb is determined (1σ: 7 ppb) in slope detection mode, including the sensor signal variations in repeated measurements. The platform's wide current range and high versatility make it suitable for signal acquisition from resistive nanosensors such as silicon nanowires, carbon nanotubes, graphene, and other 2D materials. Along with its overall low power consumption, the proposed platform is highly suitable for various sensing applications within the context of IoT.

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OBJECTIVE: Currently available ventricular assist devices provide continuous flow and do not adapt to the changing needs of patients. Physiological control algorithms have been proposed that adapt the pump speed based on the left ventricular pressure. However, so far, no clinically used pump can acquire this pressure. Therefore, for the validation of physiological control concepts in vivo, a system that can continuously and accurately provide the left ventricular pressure signal is needed. METHODS: We demonstrate the integration of two pressure sensors into a tapered inflow cannula compatible with the HeartMate 3 (HM3) ventricular assist device. Selective laser melting was used to incorporate functional elements with a small footprint and therefore retain the geometry, function and implantability of the original cannula. The system was tested on a hybrid mock circulation system. Static and simulated physiological flow and pressure profiles were used to evaluate the combined pressure and flow sensing capabilities of the modified cannula. RESULTS: The cannula prototypes enabled continuous pressure measurements at two points of their inner wall in the range of -100 and 200 mmHg. The developed, Bernoulli-based, two sensor model improved the accuracy of the measured simulated left ventricular pressure by eliminating the influence of flow inside the cannula. This method reduced the flow induced pressure uncertainty from up to 7.6 mmHg in single sensor measurements to 0.3 mmHg. Additionally, the two-sensor system and model enable the measurement of the blood flow through the pump with an accuracy of -0.14 ± 0.04 L/min, without dedicated flow sensors.

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Parylene-C is a frequently used polymeric thin-film coating in medical applications and is known for its excellent biocompatibility and flexible deposition process. However, its use in long-term implants is limited due to its poor adhesion to metals in liquid environments. In this paper, we present a strategy to anchor Parylene-C to medical grade titanium (Ti) by means of nanostructuring the Ti substrates surface prior to Parylene coating. We observe that, after aging in the physiological salt solution for three days, Parylene coating lose their adhesion to bare titanium surfaces. However, the Parylene films deposited on nanostructured Ti surfaces retain full adhesion, even after aging them in the same solution for ten days. In addition, we demonstrate that combining nanostructured surfaces with very thin Parylene coatings provides the additional benefit of accelerating cell proliferation. Nanostructured surfaces showed cell proliferation without the typically required oxygen plasma treatment. Combining plasma treatment and nanostructuring further improved proliferation performance over smooth Parylene surfaces.

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Preparation-free and skin compliant biopotential electrodes with high recording quality enable wearables for future healthcare and the Internet of Humans. Here, super-soft and self-adhesive electrodes are presented for use on dry and hairy skin without skin preparation or attachment pressure. The electrodes show a skin-contact impedance of 50 kΩ cm2 at 10 Hz that is comparable to clinical standard gel electrodes and lower than existing dry electrodes. Microstructured electrodes inspired by grasshopper feet adhere repeatedly to the skin with a force of up to 0.1 N cm-2 without further attachment even during strong movement or deformation of the skin. Skin compliance and adhesive properties of the electrodes result in reduction of noise and motion artifacts superior to other dry electrodes reaching the performance of commercial gel electrodes. The signal quality is demonstrated by recording a high-fidelity electrocardiograms of a swimmer in water. Furthermore, an electrode with soft macropillars is used to detect alpha activity in the electroencephalograms from the back of the head through dense hair. Compared to gel electrodes, the soft biopotential electrodes are nearly imperceptible to the wearer and cause no skin irritations even after hours of application. The electrodes presented here could combine unobtrusive and long-term biopotential recordings with clinical-grade signal performance.

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Turbodynamic left ventricular assist devices (LVADs) provide a continuous flow depending on the speed at which the pump is set, and do not adapt to the changing requirements of the patient. The limited adaptation of the pump flow (PF) to the amount of venous return can lead to ventricular suction or overload. Physiologic control may compensate such situations by an automatic adaptation of the PF to the volume status of the left ventricle. We evaluated two physiologic control algorithms in an acute study with eight healthy pigs. Both controllers imitate the Frank-Starling law of the heart and are based on a measurement of the left ventricular volume (LVV) or pressure (LVP), respectively. After implantation of a modified Deltastream DP2 blood pump as an LVAD, we tested the responses of the physiologic controllers to hemodynamic changes and compared them with the response of the constant speed (CS) mode. Both physiologic controllers adapted the pump speed (PS) such that the flow was more sensitive to preload and less sensitive to afterload, as compared with the CS mode. As a result, the risk for suction was strongly reduced. Five suction events were observed in the CS mode, one with the volume-based controller and none with the pressure-based controller. The results suggest that both physiologic controllers have the potential to reduce the number of adverse events when used in the clinical setting.

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The effect of a Cr adhesion layer on the transfer characteristics of Cr/Au-contacted carbon nanotube field-effect transistors (CNFETs) based on individual single-walled carbon nanotubes (SWNTs) is presented in this paper. We show that a very thin Cr layer (≈0.4 nm) already has an impact on the carrier transport in Schottky-barrier-modulated CNFETs. The ratio of the p- and n-branch current is reduced by eight times when the Cr adhesion layer thickness is increased from 0 to 8 nm. We suggest a change in Schottky barrier height at the contact as the determining mechanism for this result. Additionally, superior lifetime of devices is observed even for non-passivated CNFETs with preserved clean SWNT/Cr/Au-contacts using Cr layer thinner than 2 nm. Our experiments show that the role of the adhesion layer in metal/nanotube contacts should be explicitly considered when designing CNTFET-based circuits, developing CNFET fabrication processes, and analyzing the corresponding properties of the electrical contacts.

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Superparamagnetic nanoparticles and a functional, degradable polymer matrix based on poly(ethylene glycol) are combined to enable fully degradable magnetic microdevices for minimally invasive biomedical applications. A bioinspired helical microrobot platform mimicking Escherichia coli bacteria is fabricated and actuated using weak rotating magnetic fields. Locomotion based on corkscrew propulsion, targeted drug delivery, and low-degradation-product cytotoxicity are demonstrated.

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The strain-induced change in a carbon-nanotube diffraction pattern is found after applying strain, using a microelectromechanical tensile stage, to the outer shell of a double-walled carbon nanotube, while the inner shell provides an unstrained reference pattern. The nanotube is found to have chirality (63,21)@(65,32) with 16-20° tilt and strain up to 1% in the outer shell.

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The performance of superparamagnetic polymer composite microdevices is highly dependent on the magnetic particle content. While high loading levels are desired for many applications, the UV absorption of these nanoparticles limits the overall thickness of the fabricated microstructures and subsequently their capability of magnetic interaction. The combination of a visible-light-sensitive photoinitiator and particle self-organization is proposed to extend the exposure depth limitation in Epon SU-8 based superparamagnetic polymer composites. While superparamagnetic iron oxide particles strongly absorb i-line radiation required to cross-link the Epon SU-8 polymer matrix, we propose the utilization of H-Nu 470 photoinitiator to expand the photosensitivity of the composite toward the visible spectrum, where the dispersed nanoparticles are more transparent. The novel photoinitiator preserves the composite's superparamagnetic properties as well as a homogeneous particle distribution. As a result, particle load or resist thickness can be more than doubled while maintaining exposure time. The self-organization of ordered magnetic structures allows for an additional increase in exposure depth of up to 40%, resulting in a 2.5-fold saturation magnetization.

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Tuning of the mechanical resonance frequency of single-walled carbon nanotubes (SWCNTs) is achieved by application of uniaxial strain by purely mechanical means, utilizing both directly grown and dry-transferred SWCNTs. The induction of a beam-to-string transition is achieved, resulting in an axial tension sensitivity of 9.4 × 10(10) Hz/ε in the vibrating string regime. Increases in the resonant Q-factor, removal of residual slack, and resonance frequency changes from 10 to 60 MHz are affected.

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We present the fabrication and characterization of large arrays of inkjet-printed superparamagnetic polymer composite (SPMPC) hemispherical microstructures. SPMPCs are appealing for applications in microsystems and nanorobotics due to the added functionality of polymers and the significant magnetic attributes of embedded nanostructures. SPMPC-based microarchitectures can be used to perform different functions wirelessly in various media (e.g. water, solvents) using external magnetic fields: handling and assembling small objects, delivering drugs or biomass, or sensing specific physical or chemical changes. In this work superparamagnetic magnetite nanoparticles are dispersed in SU-8 to form magnetic hemispheres. Magnetically anisotropic hemispheres as well as standard SPMPC hemispheres are fabricated. Magnetic anisotropy is programmed by applying a magnetic field during curing. The distribution of nanoparticles inside the polymer matrix and magnetic characteristics of the SPMPC are investigated. Magnetic manipulation of hemispheres is demonstrated at liquid-liquid interfaces. Different assembly strategies to form lines or geometric shapes from hemispheres as well as their independent dynamic control are demonstrated. Finally, a two-interface assembly strategy is demonstrated to assemble hemispheres into complete spheres for advanced self-assembly tasks.

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A fully-developed photomask-based integration process is reported. The process can integrate suspended carbon nanotubes (CNTs) into micro-structures on silicon-on-insulator chips. The process features batch-compatible fabrication and post-growth metallization of suspended CNTs, which has never been demonstrated by any other processes. The post-growth metallization avoids deterioration of the metals at the elevated CNT growth temperature and enables mechanically robust double-clamped configuration. Two key steps ensure a significant reduction of the risk for damage or contamination of the CNTs during post-growth processing. SiO2 bridges were fabricated to physically support CNTs during the wet processing, and a protective Al2O3 layer (∼40 nm) was deposited to prevent resist contamination during lithography. The combination of these two steps enables the removal of the unprotected suspended segments of unwanted CNTs by oxygen plasma ashing, improving device yield by a factor of six. The electrically interfaced suspended CNT device possessed high CNT quality (D/G(+) intensity ratio of 1/224 in Raman spectroscopy) and good electrical properties, such as low device resistances as low as 105 kΩ and reduced gate hysteresis as low as 65 mV in ambient air. Measurements of eights devices indicate that the release step did not have a systematic influence on the device resistances.