RESUMEN
The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator are described. Device operation utilizes an electrostatically driven pixelated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 mum thick grid of patterned photoresist supports the 2 mum thick aluminized Mylar membrane. A conductive ZnO layer is placed on the backside of the GaAs wafer. Similar devices were also fabricated with InP. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. The device operates as an impedance distribution between two cascaded impedances of deformable membrane substrate, substrate, and electrode. An analysis of device's operation under several bias conditions, which relates membrane deformation to operating parameters, is presented.
RESUMEN
A new, optically addressed deformable mirror device is demonstrated. The device consists of a pixellated metalized polymeric membrane mirror supported above an optically addressed photoconductive substrate. A conductive transparent ZnO layer is deposited on the back side of the substrate. A very high-frequency AC bias is applied between the membrane and the back electrode of the device. The membrane is deformed when the back of the device is illuminated because of impedance and bias redistribution between two cascaded impedances. We fabricated, demonstrated, and modeled the operation of this device.