1.
Chem Commun (Camb)
; 58(77): 10805-10808, 2022 Sep 27.
Artículo
en Inglés
| MEDLINE
| ID: mdl-36073302
RESUMEN
We explore three variants of atomic layer deposition (ALD) to deposit titanium oxide on the soft polymer polydimethylsiloxane (PDMS). We show that the organic solvent resistance of PDMS is increased by two orders of magnitude compared to uncoated PDMS for ALD performed at atmospheric pressure, which results in a unique surface-subsurface coating of PDMS.