RESUMEN
We describe reproducible protocols for the chemisorption of self-assembled monolayers (SAMs), useful as imaging layers for nanolithography applications, from p-chloromethylphenyltrichlorosilane (CMPS) and 1-(dimethylchlorosilyl)-2-(p,m-chloromethylphenyl)ethane on native oxide Si wafers. Film chemisorption was monitored and characterized using water contact angle, X-ray photoelectron spectroscopy, and ellipsometry measurements. Atomic force microscopy was used to monitor the onset of multilayer deposition for CMPS films, ultimately allowing film macroscopic properties to be correlated with their surface coverage and nanoscale morphologies. Although our results indicate the deposition of moderate coverage, disordered SAMs under our conditions, their quality is sufficient for the fabrication of sub-100-nm-resolution metal features. The significance of our observations on the design of future imaging layers capable of molecular scale resolution in nanolithography applications is briefly discussed.
Asunto(s)
Hidrocarburos Clorados/síntesis química , Silanos/síntesis química , Siloxanos/síntesis química , Hidrocarburos Clorados/química , Microscopía de Fuerza Atómica , Microscopía Electrónica de Rastreo , Estructura Molecular , Silanos/química , Siloxanos/química , Propiedades de SuperficieRESUMEN
Phosphonate and phosphonic acid functionalized phosphine complexes of platinum(II) were prepared via direct reaction of the ligands with K2PtCl4 in water. Either cis or trans geometries were found depending on the nature of the ligand. The crystal structure of P(3-C6H4PO3H2)3.2H2O (6b) (triclinic, P1, a = 8.3501(6) A, b = 10.1907(6) A, c = 14.6529(14) A, alpha = 94.177(6) degrees, beta = 105.885(6) degrees, gamma = 108.784(5) degrees, Z = 2) shows a layered arrangement of the phosphonic acid. The phosphonodiamide complex cis-[PtCl2(P[4-C6H4PO[N(CH3]2]]3)2].3H2O (10) was synthesized in 89% yield and hydrolyzed to the phosphonic acid complex using dilute HCl. Aqueous phase and silica gel supported catalytic phosphonylation of phenyl triflate using palladium phosphine complexes was achieved. A molybdenum complex, Mo(CO)5[P3-C6H4PO3H2)3] (11), was synthesized in situ and grafted to an alumina surface. XPS, RBS, and AFM studies confirm the formation of a monolayer of 11 on the alumina surface.
RESUMEN
We demonstrate aqueous hydrogel-based microcontact printing of amine ligands into solvent-templated nanocavities of chloromethylphenyl-based siloxane or thin polymer films. Migration of pyridine ligands within films following printing, which can compromise pattern fidelity, is eliminated by heat treatment of the substrate. Gentle heating (e.g., 50 degrees C, 5 min) leads to the efficient alkylation of mobile pyridine adsorbate by the C-Cl bonds of the film, covalently tethering the adsorbate to the surface as a pyridinium salt. Subsequent binding of a Pd-based colloid to surface pyridinium (and remaining strongly bound and immobile pyridine ligand) sites permits selective electroless metal deposition and fabrication of patterned metal films.