RESUMEN
A high power and high quality picosecond laser is crucial in MEMS fabrication regarding micromachines. Optimal seed beam coupling is an important precondition to enhance laser efficiency. However, empirical coupling limits its development. In this paper, the physical parameters related to coupling are determined. The relationships among them are established under optical mode matching constraints to satisfy optimal seed beam coupling. According to a theoretical analysis, the focal length cut-off and the optimal coupling position of the coupling lens are acquired. A maximum transmittance of 87.2% is acquired with a 6 W input seed power in the validation experiment. In further power amplification experiments, a diffraction-limited beam quality is achieved, with M2X = 1.111, M2Y = 1.017, an optical efficiency of 60.5% and a slope efficiency of 66%, benefiting from the previous theoretical guidance.