RESUMEN
Spatial light modulators (SLMs) are important for various applications in photonics, such as near-infrared imaging, beam steering and optical communication. After decades of advances, current commercial devices are typically limited to kilohertz modulating speeds. To realize higher operating speeds, an electro-optic (EO) polymer and silicon nitride hybrid SLM has been demonstrated in this work. We utilize a specially designed metasurface to support a relatively high quality resonance and simultaneously confine most of the incident light in the active EO polymer layer. Combing with the high EO coefficient of the polymer, a clear modulation at 10 MHz with a driving voltage of Vp-p=±10 V has been observed in the proof-of-concept device. Our ï¬rst-generation device leaves vast room for further improvement and may open an attractive route towards compact SLM with an RF modulation higher than 100 GHz.
RESUMEN
As the sensitivity of the optical temperature sensor increases, one of the most important noise sources may be from the fluctuation of the surrounding gas environment (refractive index change). In this work, we have designed and fabricated an optical temperature sensor with a device size of 15 µm2. The sensor is constructed by a titanium dioxide grating on top of a double-metal surface plasmon resonance (SPR) structure. Our design can provide minimal gas environment dependence without compromising the performance in terms of temperature sensitivity. In addition, the design also facilitates a generous dimensional tolerance in the device fabrication. Based on the design, a proof-of-concept device has been fabricated and characterized. The obtained sensitivity of the fabricated sensor reaches 135 pm/â. Meanwhile, the measured resonance wavelength shift is â¼0.004 pm in different gases (air, CH4, and CO2). The presented temperature sensor should be convenient and valuable for high-accuracy temperature measurements and integrated opto-electronic sensing chips.
RESUMEN
Metasurfaces have attracted extraordinary interest in achieving novel, ultrathin and compact photonic devices. To date, however, the realization of electrically tunable high-speed metasurfaces remains a great challenge. In this work, we present an electro-optic (EO) polymer/silicon hybrid metasurface modulator with an estimated 3dB modulation bandwidth up to 118 GHz. The specially designed metasurface utilizes a broken in-plane inversion symmetry structure to generate a high-Q resonance. The high-Q property enhances the EO modulation effect, so that a 16 dB extinction ratio is theoretically verified under a driving voltage Vp-p of 4V. The pulse modulation results in an ultra-fast single-lane data rates up to 300 Gbps driven by a low RF power. The presented modulator should be applicable for high-speed and low-energy intelligent tunable metasurface, space optical communication and so on.