RESUMEN

A new microfluidic pump, termed a reflow pump, is designed to operate with a sub-µl sample volume and transport it back and forth between two pneumatically actuated reservoirs through a flow channel typically containing one or more sensor surfaces. The ultimate motivation is to efficiently use the small sample volume in conjunction with convection to maximize analyte flux to the sensor surface(s) in order to minimize sensor response time. In this paper, we focus on the operational properties of the pumps themselves (rather than the sensor surfaces), and demonstrate both two-layer and three-layer polydimethylsiloxane reflow pumps. For the three-layer pump, we examine the effects of reservoir actuation pressure and actuation period, and demonstrate average volumetric flow rates as high as 500 µl/min. We also show that the two-layer design can pump up to 93% of the sample volume during each half period and demonstrate integration of a reflow pump with a single-chip microcantilever array to measure maximum flow rate.

RESUMEN

Pneumatically actuated, non-elastomeric membrane valves fabricated from polymerized polyethylene glycol diacrylate (poly-PEGDA) have been characterized for temporal response, valve closure, and long-term durability. A ~100 ms valve opening time and a ~20 ms closure time offer valve operation as fast as 8 Hz with potential for further improvement. Comparison of circular and rectangular valve geometries indicates that the surface area for membrane interaction in the valve region is important for valve performance. After initial fabrication, the fluid pressure required to open a closed circular valve is ~50 kPa higher than the control pressure holding the valve closed. However, after ~1000 actuations to reconfigure polymer chains and increase elasticity in the membrane, the fluid pressure required to open a valve becomes the same as the control pressure holding the valve closed. After these initial conditioning actuations, poly-PEGDA valves show considerable robustness with no change in effective operation after 115,000 actuations. Such valves constructed from non-adsorptive poly-PEGDA could also find use as pumps, for application in small volume assays interfaced with biosensors or impedance detection, for example.

RESUMEN

We report the integration of a nanomechanical sensor consisting of 16 silicon microcantilevers with polydimethylsiloxane (PDMS) microfluidics. For microcantilevers positioned near the bottom of a microfluidic flow channel, a transient differential analyte concentration for the top versus bottom surface of each microcantilever is created when an analyte-bearing fluid is introduced into the flow channel (which is initially filled with a non-analyte containing solution). We use this effect to characterize a bare (nonfunctionalized) microcantilever array in which the microcantilevers are simultaneously read out with our recently developed high sensitivity in-plane photonic transduction method. We first examine the case of non-specific binding of bovine serum albumin (BSA) to silicon. The average maximum transient microcantilever deflection in the array is -1.6 nm, which corresponds to a differential surface stress of only -0.23 mN m(-1). This is in excellent agreement with the maximum differential surface stress calculated based on a modified rate equation in conjunction with finite element simulation. Following BSA adsorption, buffer solutions with different pH are introduced to further study microcantilever array transient response. Deflections of 20-100 nm are observed (2-14 mN m(-1) differential surface stress). At a flow rate of 5 µL min(-1), the average measured temporal width (FWHM) of the transient response is 5.3 s for BSA non-specific binding and 0.74 s for pH changes.

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RESUMEN

We report enhanced sensitivity for in-plane photonic transduction of static deflection of microscale cantilevers by modifying the mode structure of double-step rib waveguides used to capture light from the free end of waveguide microcantilevers. A measured sensitivity of 0.77 x 10( - 3) nm( - 1) is achieved, comparable to the best reported for the optical lever method and over two orders of magnitude larger than for piezoresistive transduction. The corresponding minimum detectable deflection is 59 pm for a 3.5 Hz measurement bandwidth.

RESUMEN

We report a differential splitter consisting of an asymmetric double-step multimode rib waveguide and a Y-branch splitter for in-plane photonic transduction of photonic microcantilever deflection. Arrays of photonic microcantilevers are integrated with differential splitters and an optical waveguide network to demonstrate uniformity and sensitivity of transduction. Measurement results from multiple arrays indicate a sensitivity of 0.32x10(-3) nm(-1) and minimum detectable deflection of 141 pm for a 3.5 Hz measurement bandwidth.

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