1.
Rev Sci Instrum
; 95(9)2024 Sep 01.
Artículo
en Inglés
| MEDLINE
| ID: mdl-39283181
RESUMEN
Depositing diamond-like carbon (DLC) film is considered to be more promising for surface modification of microparticles. The development of reliable and precise measurement techniques for DLC coatings on microparticles is crucial for advancing research in this field. This paper introduces a methodological approach for quantifying the thickness of the film on microparticles. The thickness of the film is obtained by establishing the quantitative relationship between the energy lost when electrons pass through the film and the thickness of the film. The proposed method allows for the estimation of film thickness by assessing solely the elemental abundance on the particle surfaces.